Quality Factor Improvement of a Thin-Film Piezoelectric-on-Silicon Resonator Using a Radial Alternating Material Phononic Crystal
Chuang Zhu,
Muxiang Su,
Temesgen Bailie Workie
et al.
Abstract:This paper studies the radial alternating material phononic crystal (RAM-PnC). By simulating the band gap structure of the phononic crystal, a complete acoustic band gap was verified at the resonant frequency of 175.14 MHz, which can prevent the propagation of elastic waves in a specific direction. The proposed alternately arranged radial phononic crystal structure is applied to the thin-film piezoelectric-on-silicon (TPOS) MEMS resonator. The finite element simulation method increases the anchor quality facto… Show more
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