2007
DOI: 10.1016/j.mee.2007.01.157
|View full text |Cite
|
Sign up to set email alerts
|

Source/drain extension region engineering in nanoscale double gate SOI MOSFETs: Novel design methodology for low-voltage analog applications

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
12
0

Year Published

2008
2008
2017
2017

Publication Types

Select...
7

Relationship

1
6

Authors

Journals

citations
Cited by 18 publications
(12 citation statements)
references
References 28 publications
0
12
0
Order By: Relevance
“…1b) was modeled using the expression N SD (x) = (N SD ) peak exp(-x 2 /r 2 ), where (N SD ) peak is the peak S/D doping, r (lateral straggle) defines the roll-off [13][14][15][16][17][18] of the Gaussian S/D profile as ffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi 2sd=lnð10Þ p , s is the spacer width. The S/D doping gradient (d) which provides a measure of lateral doping abruptness was evaluated as (d = 1/|dN SD (x)/dx|) [13][14][15][16][17][18][19] at the front gate edge and was varied from 3 to 5 nm/decade. Lower d values represent a steeper doping gradient, whereas higher values signify a gradual S/D junction.…”
Section: Simulationsmentioning
confidence: 99%
See 2 more Smart Citations
“…1b) was modeled using the expression N SD (x) = (N SD ) peak exp(-x 2 /r 2 ), where (N SD ) peak is the peak S/D doping, r (lateral straggle) defines the roll-off [13][14][15][16][17][18] of the Gaussian S/D profile as ffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi 2sd=lnð10Þ p , s is the spacer width. The S/D doping gradient (d) which provides a measure of lateral doping abruptness was evaluated as (d = 1/|dN SD (x)/dx|) [13][14][15][16][17][18][19] at the front gate edge and was varied from 3 to 5 nm/decade. Lower d values represent a steeper doping gradient, whereas higher values signify a gradual S/D junction.…”
Section: Simulationsmentioning
confidence: 99%
“…9a, the most significant aspect of S/D profile engineering is the substantial improvement in V EA in Early voltage (V EA = I ds /g ds ) with an increase in r. Due to an increase in r, reduction in the net dopant concentration at the gate edge causes a significant reduction in the peak electric field [19], thus yielding higher values of V EA . S/D extension region engineering results in significant relative improvement in V EA by a factor of $4 for r > 10 nm.…”
Section: Impact Of Back Gate Misalignment With Underlap Designmentioning
confidence: 99%
See 1 more Smart Citation
“…10. The underlap on the right side is longer as compared to the left side in an asymmetric FinFET-Asym2 [14]. When the voltage level of the left terminal of FinFET-Asym2 is higher than the right terminal, the on-current flowing from the left side of the device to the right side (I LR ) is reduced due to the increased series resistance of the channel with the longer underlap region on the right side of the device.…”
Section: Hybrid Finfet Sram Cell With Asymmetrically Gate-underlap Enmentioning
confidence: 99%
“…To study the source/drain engineered nanoscale double gate MOSFETs, researchers often investigate Schottky barrier source/drain [4][5][6][7] and source/drain extension region [8][9][10]. However for the first time in this work, we have studied novel attributes and design considerations of the source and drain parameters in double gate MOSFETs using two-dimensional full quantum simulation.…”
Section: Introductionmentioning
confidence: 99%