2012
DOI: 10.1016/j.mssp.2012.04.011
|View full text |Cite
|
Sign up to set email alerts
|

Design considerations of source and drain regions in nano double gate MOSFETs

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
2
0

Year Published

2015
2015
2016
2016

Publication Types

Select...
5

Relationship

1
4

Authors

Journals

citations
Cited by 5 publications
(2 citation statements)
references
References 17 publications
0
2
0
Order By: Relevance
“…The current research in this field is largely geared toward an increasing of the device density through an aggressive scaling of the device-feature sizes [1], and an improvement of the MOSFETstructure performances such as those of the double-gate (DG) MOSFETs [2][3][4], nano-wire FETs [5][6][7], nanoscale FinFETs [8,9], and nano-tube transistors [10]. As the channel length of the MOSFETs continues to shrink to several tens of nanometers, the source-to-drain and gate-tunneling of these near-ballistic devices and the inversion layers that are of a several-nanometer thickness, which are in the MOSFETs, become important issues [11].…”
Section: Introductionmentioning
confidence: 99%
“…The current research in this field is largely geared toward an increasing of the device density through an aggressive scaling of the device-feature sizes [1], and an improvement of the MOSFETstructure performances such as those of the double-gate (DG) MOSFETs [2][3][4], nano-wire FETs [5][6][7], nanoscale FinFETs [8,9], and nano-tube transistors [10]. As the channel length of the MOSFETs continues to shrink to several tens of nanometers, the source-to-drain and gate-tunneling of these near-ballistic devices and the inversion layers that are of a several-nanometer thickness, which are in the MOSFETs, become important issues [11].…”
Section: Introductionmentioning
confidence: 99%
“…Under such condition, source and drain resistance value becomes larger leading to a degradation of the ON-current. The impact of parasitic resistance is even more crucial in nanoscale DG device because it holds two channels for current flow [6,7]. Moreover, some recent studies have shown twofold decisive issues: the non-conformality of the doping process and the concentration-dependent indiffusion.…”
mentioning
confidence: 99%