Single-Pixel MEMS Imaging Systems

Abstract

Single-pixel imaging technology is an attractive technology considering the increasing demand of imagers that can operate in wavelengths where traditional cameras have limited efficiency. Meanwhile, the miniaturization of imaging systems is also desired to build affordable and portable devices for field applications. Therefore, single-pixel imaging systems based on microelectromechanical systems (MEMS) is an effective solution to develop truly miniaturized imagers, owing to their ability to integrate multiple functionalities within a small device. MEMS-based single-pixel imaging systems have mainly been explored in two research directions, namely the encoding-based approach and the scanning-based approach. The scanning method utilizes a variety of MEMS scanners to scan the target scenery and has potential applications in the biological imaging field. The encoding-based system typically employs MEMS modulators and a single-pixel detector to encode the light intensities of the scenery, and the images are constructed by harvesting the power of computational technology. This has the capability to capture non-visible images and 3D images. Thus, this review discusses the two approaches in detail, and their applications are also reviewed to evaluate the efficiency and advantages in various fields.

MEMS gratings and their applications

“…Thus, MEMS scanning gratings can be used in the same way as MEMS scanning mirrors in various scanning systems for monochromatic applications, such as laser projection displays systems, single-pixel imaging systems, laser scanning confocal microscopes and many other applications. [60][61][62][63] Light Detection and Ranging (LiDAR) is a special scanning system to measure the dynamic distance, and such systems can be constructed with either MEMS scanners or MEMS OPA devices. Figure 8 depicts a typical LiDAR system using a MEMS device, and a short laser pulse is generated by the transmitter.…”

Single-pixel Tracking and Imaging under Weak Illumination

“…In practice, several hundreds samplings are enough for velocity calculation with considerable accuracy. For a GI or SPI system with sampling rate of 10 5 Hz [15,16] or higher [17][18][19], the velocity measurement time t m is in the order of microsecond, within which the velocity can be taken as constant for most cases. Compared with Eq.…”

“…However, the performance of GI and SPI for imaging moving objects is currently limited, since a large number of samplings are expected to be finished within the time interval that the objects can be treated as 'frozen'. Toward this, many approaches have been put forward to increase the sampling rate [15][16][17][18][19] or reduce the required number of samplings [20][21][22][23][24][25][26]. Benefits from the fact that tracking usually requires less information than spatially imaging, researchers also propose to acquire the trajectory of the moving object in lower dimension [27] or in Fourier spectrum domain [28], with no image obtained.…”

Topological Optimization of Circular SAW Resonators: Overcoming the Discreteness Effects

“…Due to the technologies used in the manufacture of microelectronics, the size of the sensors can be reduced to a match head, but the accuracy and mechanical strength, in most cases, will decrease. The last two parameters, considered to be disadvantages, are not decisive in the consumer segment, which allowed MEMS to become widespread in medicine [ 1 ], sports [ 2 ], the gaming industry [ 3 ] and especially in portable technology [ 4 , 5 , 6 ].…”