Topological Optimization of Circular SAW Resonators: Overcoming the Discreteness Effects

Shevchenko, Sergey; Mikhailenko, Denis A.

doi:10.3390/s22031172

Cited by 10 publications

(5 citation statements)

References 19 publications

(21 reference statements)

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“…By substituting the equation (20) into equation (15), the thickness of cantilever beam can be obtained as:…”

Section: Equal-strength Cantilever Beam Designmentioning

confidence: 99%

“…By substituting this equation into equation (15), the thickness of equal-strength beam for high-G is obtained as: From the above formula, it can be seen that this equal-strength beam has the feature of being thick in the middle and thin at both ends.…”

Section: Equal-strength Beam For High-g Designmentioning

confidence: 99%

“…In 2020, Shevchenko et al proposed a novel sensitive element using aluminum nitride membrane for acceleration measurement, and achieved a sensitivity of 43 Hz g −1 [14]. In 2022, the optimization strategy was further proposed by them to narrow the bandwidth and improve signal detection [15].…”

Section: Introductionmentioning

confidence: 99%

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Equal-strength beam design of acoustic wave accelerometers

Zhao,

Zhou,

Kuang

et al. 2023

Phys. Scr.

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Surface acoustic wave (SAW) based accelerometers have received significant attention due to their digital output, low cost, mass production and easy implementation of wireless passive function. However, conventionally triangular cantilever-beam based SAW accelerometers often have non-uniform strains generated along the beams, which cause emergence of parasitic wave modes and measurement errors. In this paper, a simulation platform was developed to analyze and optimize designs of SAW accelerometers and variable-thickness and equal-strength beams were designed to solve the critical issue of non-uniform strain distribution along the beam. Frequency responses of SAW accelerometers under the acceleration were successfully obtained using the simulation platform, with the visualized strain/stress distribution and particle displacement field. The accuracy of this simulation platform was verified using the experimental result reported in literature. A highly sensitive and equal-strength beam SAW accelerometer was achieved with a sensitivity up to 1.40 kHz/g, a linearity coefficient of ~1, and a measurement range of 0~15 g. Furthermore, a high-G accelerometer was designed, with the capability of enduring large shocks up to 11,500 g and a sensitivity of 6.96 Hz/g.

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“…By substituting the equation (20) into equation (15), the thickness of cantilever beam can be obtained as:…”

Section: Equal-strength Cantilever Beam Designmentioning

confidence: 99%

Section: Equal-strength Beam For High-g Designmentioning

confidence: 99%

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Equal-strength beam design of acoustic wave accelerometers

Zhao,

Zhou,

Kuang

et al. 2023

Phys. Scr.

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“…In 2018, Shevchenko et al developed another SAW accelerometer with a high sensitivity of about 14.62 kHz g −1 but with a poor detection range of only ±2 g [14]. In 2022, the same group optimized its design to narrow the bandwidth and improve signal detection, while considering technological fabrication limitations [22].…”

Section: Introductionmentioning

confidence: 99%

Versatile and effective design platform for surface acoustic wave accelerometers

et al. 2023

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Micro-Electro-Mechanical Systems (MEMS) accelerometers have great potentials for applications in aerospace, autonomous driving and consumer electronics. However, most of their working principles are based on capacitive and resistance types, which cannot be easily used for wireless and passive sensing, while surface acoustic waves (SAWs) are the key solution for this problem. Due to complex acoustic-electric-mechanical coupling during accelerator operations, currently, there needs an accurate, reliable, and efficient design and simulation platform to improve the structure and performance of SAW based accelerometers. In this work, we proposed an accurate, reliable, and efficient modeling platform to optimize designs of SAW accelerometers, using a double-ended cantilever beam structure as an example. This model integrated elastic acoustic effect and the coupled wave equations under both the mechanical and electrical loading using the finite element analysis, and obtained acceleration-frequency responses of the accelerators. We have systematically simulated effects of thickness of piezoelectric film, wavelengths, and structural parameters of cantilever beams, and the simulation results are well consistent with the theoretical results. Finally, using the developed model, we designed a high-G SAW accelerometer (up to 20000 g), which achieved a high sensitivity (-41.8 Hz/g) and excellent linearity (0.9999), and another high sensitivity accelerometer (3.02 KHz/g), with a good linearity (0.9999) over a 100 g acceleration range.

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“…Since the SAW is a mechanical wave that propagates along the surface of a piezoelectric substrate or film, it is very sensitive to surface disturbances. Based on the piezoelectric effect, the input interdigital transducer (IDT) can generate an SAW that propagates along the surface of the piezoelectric substrate, which can then be converted back into an electrical signal by the output IDT [17,18]. When the SAW propagates, the Coriolis force generated by the rotation of the SAW angular velocity sensor acts on the vibrating particles [19] and generates a secondary pseudo-SAW, coupled with the original SAW [20], leading to changes in the phase velocity of the SAW, a process known as the SAW gyroscopic effect [21].…”

Section: Introductionmentioning

confidence: 99%

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Chen,

Meng,

et al. 2023

Micromachines

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The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezoelectric substrate to form a double-layer structure significantly enhanced the SAW gyroscopic effect, and the smaller the reflection coefficient of the lower-layer material, the stronger the SAW gyroscopic effect, with values being reached that were two to three times those with single-layer substrate structures. This was confirmed using a three-dimensional model, and the experimental results also showed that the thickness of the piezoelectric layer and the type of the lower-layer material also had a significant impact on the SAW gyroscopic effect. This novel discovery will pave the way for the future development of SAW angular velocity sensors.

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Topological Optimization of Circular SAW Resonators: Overcoming the Discreteness Effects

Cited by 10 publications

References 19 publications

Equal-strength beam design of acoustic wave accelerometers

Equal-strength beam design of acoustic wave accelerometers

Versatile and effective design platform for surface acoustic wave accelerometers

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

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