Single-pixel imaging technology is an attractive technology considering the increasing demand of imagers that can operate in wavelengths where traditional cameras have limited efficiency. Meanwhile, the miniaturization of imaging systems is also desired to build affordable and portable devices for field applications. Therefore, single-pixel imaging systems based on microelectromechanical systems (MEMS) is an effective solution to develop truly miniaturized imagers, owing to their ability to integrate multiple functionalities within a small device. MEMS-based single-pixel imaging systems have mainly been explored in two research directions, namely the encoding-based approach and the scanning-based approach. The scanning method utilizes a variety of MEMS scanners to scan the target scenery and has potential applications in the biological imaging field. The encoding-based system typically employs MEMS modulators and a single-pixel detector to encode the light intensities of the scenery, and the images are constructed by harvesting the power of computational technology. This has the capability to capture non-visible images and 3D images. Thus, this review discusses the two approaches in detail, and their applications are also reviewed to evaluate the efficiency and advantages in various fields.
Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.
In this paper, a single-pixel mid-infrared (mid-IR) Hadamard transform spectrometer is developed. The spectrometer’s design, fabrication and experimental results are discussed. The single-pixel mid-IR Hadamard transform spectrometer has dual cascaded encoding regions, 2875 nm to 3500 nm and 3500 nm to 4077 nm, to reduce the travel range required by the moving mask. The encoded wavelength band is determined by the bandpass filter used. A collection optics consisting of a reverse spectrometer is used to collect the encoded signal onto a single-pixel detector with a small sensing area. A 635 nm laser is used as a reference within the spectrometer to calibrate the recovered spectrum with accurate positioning. Our experiments demonstrate that mid-IR spectrums can be accurately recovered in the designed wavelength range. The proposed spectrometer, with dimensions of 200 mm × 200 mm × 84 mm and a weight of 1.8 kg, can be made portable and at low cost, suitable for IR spectroscopy in the field.
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