Abstract:Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning grat… Show more
“…73–85 The nanofabrication technologies for preparing SEIRA/SERS substrates include chemical preparation methods, photolithography, electron beam lithography, magnetron sputtering, electron beam evaporation, and more. 86–107 The widely used theory for modeling SERS/SEIRA includes perturbation theory, 108 temporal coupled-mode theory, 109,110 coupled harmonic oscillator theory, 111 and so on. As mentioned earlier, machine learning is complementary to SERS/SEIRA and offers unparalleled possibilities for solving pressing challenges related to spectral artifacts, overlapping, and huge volumes of spectral data (Fig.…”
Section: Concept Of Machine Learning Enhancing Sers and Seiramentioning
The world today is witnessing the significant role and huge demand for molecular detection and screening in healthcare and medical diagnosis, especially during the outbreak of COVID-19. Surface-enhanced spectroscopy techniques,...
“…73–85 The nanofabrication technologies for preparing SEIRA/SERS substrates include chemical preparation methods, photolithography, electron beam lithography, magnetron sputtering, electron beam evaporation, and more. 86–107 The widely used theory for modeling SERS/SEIRA includes perturbation theory, 108 temporal coupled-mode theory, 109,110 coupled harmonic oscillator theory, 111 and so on. As mentioned earlier, machine learning is complementary to SERS/SEIRA and offers unparalleled possibilities for solving pressing challenges related to spectral artifacts, overlapping, and huge volumes of spectral data (Fig.…”
Section: Concept Of Machine Learning Enhancing Sers and Seiramentioning
The world today is witnessing the significant role and huge demand for molecular detection and screening in healthcare and medical diagnosis, especially during the outbreak of COVID-19. Surface-enhanced spectroscopy techniques,...
“…One common material used for the fabrication of optoelectronic device is Silicon (Rao et al 2010 ). After silicon, III–V semiconductor materials such as Indium Galium Arsenide (InGaAs) (Iqbal et al 2020 ), Gallium Nitride (GaN) (Ziane et al 2015 ) and Indium Phosphide (InP) (Zheng et al 2022 ) have been the fastest-growing, most widely-used and highest-output semiconductor materials for optoelectronic use (Zhou 2021 ; Amiri and Lazreg 2021 ). Compound semiconductor materials outperform conventional semiconductor materials in terms of (1) High electron mobility (2) Wide bandwidth (3) High frequency (4) High power (5) High linearity (6) Diversity of material selection (7) Anti radiation.…”
Section: Design and Theoretical Backgroundmentioning
During the outbreak of the COVID-19 illness, mRNA (messenger RNA) injections proved to be effective vaccination. Among the presently available analytical techniques, UV/VIS spectrophotometry is a trustworthy and practical instrument that may provide information on the chemical components of the vaccine at the molecular level. In this paper, we will present a one-dimensional grating of InGaAs as a prospect grating structure for UV–VIS spectrometer that can be used for mRNA vaccine development. The main parameters and the wavelength region used in mRNA vaccine development lies in the range of 200 nm to 700 nm (UV–VIS Range). The incorporation of new materials that are excellent for cutting-edge semiconductor industry procedures for MEMS manufacture, as well as new optimal parameters, will improve the grating and spectrometer’s performance which will enhance the mRNA vaccine development and manufacturing workflows enabled by UV–VIS spectroscopy. Hence we evaluated the feasibility of the materials, Si (Silicon), GaN (Gallium Nitride), InGaAs (Indium Gallium Arsenide) and InP (Indium Phosphide) as a grating material. Reflection spectrum of the proposed structure shows 48% increase compared to the grating made up of Silicon. In order to model wave propagation in one grating unit cell, electromagnetic waves frequency domain interface is used. The periodic constraints of floquet periodicity are used for simulation at both faces of the unit cell. The reflectance of grating with each material as functions of the angle of incidence was plotted. Also we evaluated the effect of grating thickness, groove density, spectral resolution and efficiency over different materials namely Si, GaN, InGaAs and InP. After optimizing geometric parameters, the designed InGaAs based grating achieved a efficiency of 87.45% and can be a reliable prospect for mRNA based vaccine development.
“…Among these tuning mechanisms, two solutions have raised the attention and been reported frequently, microelectromechanical systems (MEMS) technology and tunable two-dimensional (2D) materials. On the one hand, the geometric-dependent metamaterial resonators could be effectively influenced by changing the configuration of unit cells, which can be enabled by MEMS actuators to a broadband frequency ranging from THz to visible light ( Lin and Lee, 2014 ; Dong et al., 2020a ; Ma et al., 2020b ; Ren et al., 2020 ; Dong et al., 2020b ; Lin and Xu, 2020 ; Pitchappa et al., 2021a ; Zhou et al., 2021a ; Wang et al., 2021 ). Moreover, the integration of MEMS actuators and metamaterials are compatible with the current complementary metal-oxide-semiconductor (CMOS) fabrication platform.…”
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