Selfaligned integrated silica on silicon waveguide-photodiode interface

Crookes, C.G.; Croston, I. R.; Pescod, C.R.

doi:10.1049/el:19940662

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Waveguide-to-photodetector1

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1999

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Cited by 6 publications

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“…Coupling of SiON/SiO 2 waveguides to an ion implanted pin silicon photodiode has provided detector efficiencies of up to 88%, depending on the detector type and the type of anti-reflection coatings employed [60,61]. Alternatively, III±V-based detectors can be hybridly coupled to a Si waveguide; structures featuring SiO 2 waveguides and etched angle mirrors [62] and passive alignment features [63] have been demonstrated.…”

Section: Waveguide-to-photodetectormentioning

confidence: 99%