Semiconductor Optical Sensors

Zappe, Hans

doi:10.1002/1616-8984(199904)5:1<3::aid-seup3>3.0.co;2-v

Cited by 2 publications

(3 citation statements)

References 109 publications

(122 reference statements)

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“…Passive waveguides, couplers, splitters, and many types of free-space optical structures for MEMS are advantageously made using this material, not least due to the compatibility with established MEMS technology. [39] Data in Table 8.1 are partially from Zappe.…”

Section: Siliconmentioning

confidence: 99%

“…Efficient light emission, strong electro-optical effects, and the ability to make high-quality heterostructure waveguides have made this the material system of choice for laser diodes, modulators, and photonic integrated circuits. [39] Data in Table 8.2 are partially from Zappe.…”

Section: Gaasmentioning

confidence: 99%

“…[39] The two integrated optical displacement sensors we consider are both interferometric, based on integrated optical Michelson interferometers. As an example of what is possible with the technologies and devices discussed in previous sections, we will take a brief look at monolithic displacement measurement chips developed at two laboratories, which are described in detail by Zappe.…”

Section: Application Example: Monolithic Displacement Sensorsmentioning

confidence: 99%

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Integrated Micro-Optics

Zappe

2006

Mems

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Section: Siliconmentioning

confidence: 99%

Section: Gaasmentioning

confidence: 99%

Section: Application Example: Monolithic Displacement Sensorsmentioning

confidence: 99%

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Integrated Micro-Optics

Zappe

2006

Mems

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CMOS Single Chip Gas Detection Systems — Part I

et al. 2002

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The current trend to control indoor air-quality and to monitor environmental pollution has created a strong demand for miniaturized and inexpensive gas sensors for volatile organic compounds (VOCs). Gas sensor arrays based on industrial CMOS-processes combined with post-CMOS micromachining (CMOS MEMS) are a promising approach to low-cost sensor devices. In this article, the state of research of CMOS-based gas sensor systems is reviewed, and a platform technology is described, which provides the possibility of monolithically integrating several different transducers on a single chip. A design environment, batch-fabrication processes, and fast testing procedures were developed to realize an example single-chip gas detection system. The chip includes the transducers, their biasing circuitry, reference elements, a digital interface, and a temperature sensor. The three polymer-based transducers and their interface electronics will be detailed in the second part of this article [1].

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Semiconductor Optical Sensors

Cited by 2 publications

References 109 publications

Integrated Micro-Optics

Integrated Micro-Optics

CMOS Single Chip Gas Detection Systems — Part I

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