Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique

Terui, H.; Shimokozono, Makoto; Yanagisawa, Masahiro; Hashimoto, Toshikazu; Yamada, Yuki; Horiguchi, M.

doi:10.1049/el:19961091

Cited by 9 publications

(5 citation statements)

References 3 publications

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“…3(c), the driving torque from the liquid is resisted by inertia and by two drag components, due to air resistance and hinge viscosity, with damping coefficients and , respectively. The equation of motion is (13) Here is the angular moment of inertia of the flap and torques are per unit length.…”

Section: F Speed Of Assemblymentioning

confidence: 99%

“…These techniques have been adapted to the more demanding environment of optical packaging, in what is widely referred to as "silicon optical bench technology". Surface tension has been used for alignment of hybrid integrated semiconductor laser diodes [10], [11], silica based planar lightwave circuits [12], and photodiodes [13]. The first two applications involve coupling of waveguide components, when micron-level misalignment creates significant optical loss.…”

mentioning

confidence: 99%

See 1 more Smart Citation

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Syms¹,

Yeatman²,

Bright

et al. 2003

J. Microelectromech. Syst.

321

238

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Abstract-Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for accurately determining the assembled shape are discussed, and the limits on accuracy and structural distortion are considered. Applications in optics, electronics and mechanics are described. More complex operations (including the combination of self-assembly and self-organization) are also reviewed.[926]Index Terms-Capillary force, microelectromechanical systems (MEMS), microsystems, microoptoelectromechanical systems (MOEMS), self-assembly, surface tension.

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Section: F Speed Of Assemblymentioning

confidence: 99%

mentioning

confidence: 99%

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Syms¹,

Yeatman²,

Bright

et al. 2003

J. Microelectromech. Syst.

321

238

View full text Add to dashboard Cite

show abstract

“…Several authors have already proposed and demonstrated the fabrication of out-of-plane 45 o mirrors on polymer waveguide platforms [18][19][20][21] and silica waveguide platforms [22][23][24][25] with technologies such as dry etching, 19,20 dicing, 21,24 embossing, 25 and excimer laser ablation. 18 High quality mirrors with the excess loss due to the mirror angle and surface quality of <0.3dB have been fabricated in both silica and polymer waveguides.…”

Section: Waveguide Shufflingmentioning

confidence: 99%

“…18 High quality mirrors with the excess loss due to the mirror angle and surface quality of <0.3dB have been fabricated in both silica and polymer waveguides. 18,[21][22][23] In this paper, out-of-plane 45 o mirrors are fabricated with a technique based on excimer laser ablation. 18 Since this optical polymer has a high absorption peak at 193nm, the exposure to ArF excimer laser evaporates and subsequently etches away the material.…”

Section: Waveguide Shufflingmentioning

confidence: 99%

The integration of silica and polymer waveguide devices for ROADM applications

et al. 2011

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We report on our efforts to integrate silica and polymer waveguide devices, such as arrayed waveguide gratings (AWG's), tunable lenses, optical switches, variable optical attenuators (VOA's), power taps. In particular, the realizations of various optical add/drop multiplexers and tunable dispersion compensators are discussed. The integration techniques, the design architectures and the corresponding optical performances are presented.

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“…The 45 waveguide mirror is insensitive to the wavelength of light and has high coupling efficiency. There are various techniques to fabricate a 45 mirror such as laser ablation [17], oblique reactive ion etching (RIE) [18], temperature-controlled RIE [19], reflow [20], and machining [21]. The laser ablation method is subjected to lower throughput and surface damage.…”

Section: Waveguide Mirror Couplermentioning

confidence: 99%

Flexible optical waveguide film fabrications and optoelectronic devices integration for fully embedded board-level optical interconnects

Choi

Lin

Liu

et al. 2004

J. Lightwave Technol.

149

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Abstract-This paper demonstrates a flexible optical waveguide film with integrated optoelectronic devices (vertical-cavity surfaceemitting laser (VCSEL) and p-i-n photodiode arrays) for fully embedded board-level optical interconnects. The optical waveguide circuit with 45 micromirror couplers was fabricated on a thin flexible polymeric substrate by soft molding. The 45 couplers were fabricated by cutting the waveguide with a microtome blade. The waveguide core material was SU-8 photoresist, and the cladding was cycloolefin copolymer. A thin VCSEL and p-i-n photodiode array were directly integrated on the waveguide film. Measured propagation loss of a waveguide was 0.6 dB/cm at 850 nm.Index Terms-embedded optical interconnects, 45 micromirror coupler, printed circuit board (PCB), poly(dimethylsiloxane) (PDMS), soft molding, SU-8, topas, vertical-cavity surface-emitting laser (VCSEL), waveguide film.

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Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique

Cited by 9 publications

References 3 publications

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Surface tension-powered self-assembly of microstructures - The state-of-the-art

The integration of silica and polymer waveguide devices for ROADM applications

Flexible optical waveguide film fabrications and optoelectronic devices integration for fully embedded board-level optical interconnects

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