Abstract-This paper demonstrates a flexible optical waveguide film with integrated optoelectronic devices (vertical-cavity surfaceemitting laser (VCSEL) and p-i-n photodiode arrays) for fully embedded board-level optical interconnects. The optical waveguide circuit with 45 micromirror couplers was fabricated on a thin flexible polymeric substrate by soft molding. The 45 couplers were fabricated by cutting the waveguide with a microtome blade. The waveguide core material was SU-8 photoresist, and the cladding was cycloolefin copolymer. A thin VCSEL and p-i-n photodiode array were directly integrated on the waveguide film. Measured propagation loss of a waveguide was 0.6 dB/cm at 850 nm.Index Terms-embedded optical interconnects, 45 micromirror coupler, printed circuit board (PCB), poly(dimethylsiloxane) (PDMS), soft molding, SU-8, topas, vertical-cavity surface-emitting laser (VCSEL), waveguide film.
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