2017
DOI: 10.2200/s00750ed1v01y201701eet009
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Radiation Imaging Detectors Using SOI Technology

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Cited by 3 publications
(2 citation statements)
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“…The layer underneath the BOX can be used as a sensor layer. Several well structures give the possibility to isolate the transistor from any influence of charge build-up in the BOX (the issue initially seen in FD-SOI technology [28,29]). The HV-SOI technology allows access to the handling wafer/substrate using vias to create a charge collecting node as well as provide bias to the sensor A standard CMOS circuit can be realized in the logic layer above BOX.…”
Section: Hv-soimentioning
confidence: 99%
“…The layer underneath the BOX can be used as a sensor layer. Several well structures give the possibility to isolate the transistor from any influence of charge build-up in the BOX (the issue initially seen in FD-SOI technology [28,29]). The HV-SOI technology allows access to the handling wafer/substrate using vias to create a charge collecting node as well as provide bias to the sensor A standard CMOS circuit can be realized in the logic layer above BOX.…”
Section: Hv-soimentioning
confidence: 99%
“…We have developed a new active pixel sensor for heavy ions having energies compatible with the reaction products of the most common neutron converter materials. The sensor chip is based on SOI CMOS technology (SOIPIX) [11]. In this paper, we report the monolithic architecture and the preliminary tests with alpha source.…”
Section: Introductionmentioning
confidence: 99%