Pulsed Laser Deposition‐based Thin Film Microbatteries

Abstract

Emerging applications for robust small format or distributed devices feature a need for power and rechargeable lithium-ion batteries could play a significant role. This review focuses on a high precision technique to controllably grow thin-film electrodes or full all-solid-state batteries, that is, pulsed laser deposition (PLD). The technique and solidstate batteries are introduced followed by a detailed showcase of the depth of PLD-based growth undertaken on cathodes, electrolytes, anodes and whole microbatteries. Emphasis is placed on the various characterization techniques available to study PLD grown components and devices, and how interfaces become both critical and arguably easier to probe in PLD grown films or devices. This work provides a perspective on the techniques, its opportunities for electrodes and devices, and how to probe the resulting growth and its evolution in batteries.

Sulfide and Oxide Inorganic Solid Electrolytes for All-Solid-State Li Batteries: A Review

“…These batteries can only be used for low-power applications owing to their thin film nature; in addition, the deposition technique used for fabricating these devices is expensive compared with the traditional slurry coating method used to manufacture Li batteries. Despite these limitations, after Oudenhoven et al [ 117 ] proposed the concept and design of 3D microbatteries, the use of thin-film electrolytes for microelectronic applications has been explored by many researchers [ 504 , 505 , 506 , 507 , 508 , 509 , 510 , 511 , 512 , 513 , 514 , 515 , 516 , 517 , 518 , 519 , 520 , 521 ].…”

Recent advancements in solid electrolytes integrated into all-solid-state 2D and 3D lithium-ion microbatteries

“…Such methods of deposition as sputtering, 60,194 ebeam evaporation, 190 sol-gel, 149 spin-coating, 195 PLD 186,196 and ALD were applied to produce thin-lm crystalline electrolytes, and various preparation conditions were reviewed. 29,44,149,197,198 The other new deposition methods, for instance, for LLZO, are currently under development and optimization as discussed above. 147,148 Up to now, it was observed that the higher e-beam evaporation power (600 W) applied for the LLTO fabrication resulted in a higher ionic conductivity.…”

“…281 Other techniques, like PLD and ALD, are gaining more attention in LiPON studies due to the promising results, and these techniques' features are discussed in the recent reviews by Julien et al, 29 and Liu et al, 43 Meng et al, 44 Fenech and Sharma. 198 In short, for PLD, the importance of N 2 gas pressure and laser uence was highlighted so far, 266 while for ALD, the precursors and the temperature window were mentioned to be important parameters. 43,44 Thorough studies on PLD/ALD conditions and their impact on LiPON's direct performance in the microbatteries are still limited.…”

Physical Vapor Deposition of Cathode Materials for All Solid-State Li Ion Batteries: A Review

“…(A) Thermal evaporation, S. Babar, CC BY-SA 3.0, via Wikimedia Commons, (B) sputter deposition using Ar gas, Sigma-Aldrich, CC BY-SA 4.0, via Wikimedia Commons, (C) pulsed laser deposition, (D) electron beam evaporation, Jatosado, CC BY-SA 3.0, via Wikimedia Commons. Teng et al, 2018;Yu et al, 2018;Fenech and Sharma 2020). However, only few have actually fabricated ASTBs with thin-film solid electrolytes using PLD techniques (Huang et al, 2003;Huang et al, 2004;Kuwata et al, 2004;Baskaran et al, 2009;Matsuda et al, 2018).…”