Physical Vapor Deposition of Cathode Materials for All Solid-State Li Ion Batteries: A Review

Abstract

With the development of smart electronics, a wide range of techniques have been considered for efficient co-integration of micro devices and micro energy sources. Physical vapor deposition (PVD) by means of thermal evaporation, magnetron sputtering, ion-beam deposition, pulsed laser deposition, etc., is among the most promising techniques for such purposes. Layer-by-layer deposition of all solid-state thin-film batteries via PVD has led to many publications in the last two decades. In these batteries, active materials are homogeneous and usually binder free, which makes them more promising in terms of energy density than those prepared by the traditional powder slurry technique. This review provides a summary of the preparation of cathode materials by PVD for all solid-state thin-film batteries. Cathodes based on intercalation and conversion reaction, as well as properties of thin-film electrode–electrolyte interface, are discussed.

High‐Throughput Experimentation and Computational Freeway Lanes for Accelerated Battery Electrolyte and Interface Development Research

“…This synthetic method was used to synthesize solid state thin film libraries for metal alloys by coevaporation of the multiple pure elements on temperature-controlled substrates. [102,103] The basic configuration of the HT-PVD system consists of a PVD chamber under an ultrahigh vacuum environment, which has off-axis sources and electron beam evaporators or Knudsen cell sources. [104] This method not only has the advantages of HT and simplicity but also enables the synthesis of solid state electrolytes with a large compositional range without the need of heat treatment.…”

Recent Advances and Challenges in Ultrafast Photonics Enabled by Metal Nanomaterials

“…Physical vapor deposition is widely used in coating processes, which can be subdivided into thermal evaporation, sputter deposition, pulsed laser deposition, and electron beam deposition according to the synthesis mechanisms. [ 83 ] Solid metal is first evaporated into vapor, which then nucleates and condenses at the target to form solid MNPs. [ 84 ] For ultrafast applications, thermal evaporation, sputter deposition, and electron beam deposition have been reported in the preparation of MNP SAs.…”

Facile Deposition of the LiFePO4 Cathode by the Electrophoresis Method

“…There is a review summarizing research on the physical vapor deposition of cathode materials on different types of substrates . Notwithstanding, the availability of deposition methods to develop cathodes on various substrates require multistep preparation procedures and conditions of an inert atmosphere, high temperatures, and low pressure . Occasionally, the outcome of such harsh conditions could be severe phase transitions of the compounds, resulting in undesired aftermath and performance deterioration. , Thus, the electrophoretic deposition method could be considered a very promising technique to obtain single-phase thin-film electrodes.…”

“…Tiurin et al applied the same technique to prepare a LiMn 1.5 Ni 0.5 O 4 cathode . There is a review summarizing research on the physical vapor deposition of cathode materials on different types of substrates . Notwithstanding, the availability of deposition methods to develop cathodes on various substrates require multistep preparation procedures and conditions of an inert atmosphere, high temperatures, and low pressure .…”