Pull-In Dynamic of electrostatically-Actuated Beams

Gupta, Raj K.; Hung, E.S.; Yang, Yao‐Joe; Ananthasuresh, G. K.; Senturia, S.D.

doi:10.31438/trf.hh1996a.1

Cited by 26 publications

(24 citation statements)

References 2 publications

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“…13 also show that RPC predictions are close to the values obtained via numerical time integration of the system equations ( 14). This is important because within the RPC calculation, the resonant frequency is approximated by the voltage-corrected frequency (32). Fig.…”

Section: Resultsmentioning

confidence: 99%

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Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators

Fargas-Marques

Casals‐Terré

Shkel

2007

J. Microelectromech. Syst.

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Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. In the static case, the stable actuation voltages are limited by the static pull-in condition, which indicates that the travel range is approximately limited to 1/3 of the initial actuation gap. Under dynamic actuation conditions, however, the stable voltages are reduced, whereas the travel range can be much extended. This is the case with the dynamic pull-in and the resonant pull-in conditions (RPCs). Using energy analysis, this paper extends the study of pull-in instability to the resonant case and derives the analytical RPC. This condition predicts snapping or pull-in of the structure for a given domain of dc and ac actuation voltages versus quality factor, taking into account the nonlinearities due to large amplitudes of oscillation. Experimental results are presented to validate the analytically derived RPC.

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Section: Resultsmentioning

confidence: 99%

“…Again, if a linear spring is used, the analytical expression has a simplified form. In this case, the voltage limit has always the unstable equilibrium at the center of the gap and is described by the following expression [32]:…”

Section: B Dynamic Casementioning

confidence: 99%

Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators

Fargas-Marques

Casals‐Terré

Shkel

2007

J. Microelectromech. Syst.

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show abstract

“…On the other hand, dynamic pull-in takes place when the system is excited using a combination of AC and DC voltages. In this case, the dynamic pull-in instability occurs before static pull-in (Gupta et al, 1996), and co-workers (Nayfeh et al, 2007;Najar et al, 2010) showed that dynamic pull-in occurs at voltages as low as 25 per cent of the static pull-in voltage around the resonant frequency.…”

Section: Introductionmentioning

confidence: 94%

“…These nonlinearities are mainly due to the nature of electrostatic force which is inversely proportional to the square of the distance between the two electrodes, a sudden collapse of the moving part of the microswitch yield it to its ON or OFF states, and this phenomena is known as pull-in instability. In the literature, the pull-in instability is classified into static, transient and dynamic pull-in (Gupta et al, 1996;Nayfeh et al (2007); Najar et al, 2010). Static pull-in occurs when the DC voltage exceeds a threshold value with maximum displacements varying from 33 to 41 per cent of the initial electrode gap distance.…”

Section: Introductionmentioning

confidence: 99%

MEMS SPDT microswitch with low actuation voltage for RF applications

Samaali

Najar

Ouni

et al. 2015

Microelectronics International

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If you would like to write for this, or any other Emerald publication, then please use our Emerald for Authors service information about how to choose which publication to write for and submission guidelines are available for all. Please visit www.emeraldinsight.com/authors for more information. About Emerald www.emeraldinsight.comEmerald is a global publisher linking research and practice to the benefit of society. The company manages a portfolio of more than 290 journals and over 2,350 books and book series volumes, as well as providing an extensive range of online products and additional customer resources and services.Emerald is both COUNTER 4 and TRANSFER compliant. The organization is a partner of the Committee on Publication Ethics (COPE) and also works with Portico and the LOCKSS initiative for digital archive preservation. AbstractIn the present work, we propose a novel design of an ohmic contact SPDT (Single-Pole Double-Throw) MEMS microswitch for RF applications. We study the dynamic behavior of the SPDT MEMS microswitch. The proposed microswitch (SPDT design) shares antenna between transmitter and receiver in a wireless sensor. An electrical voltage is used to create an electrostatic force that controls the On/Off states of the microswitch. First, we develop a mathematical model of the proposed microswitch and propose a Reduced-Order Model (ROM) of the design, based on the Differential Quadrature Method (DQM), which fully incorporates the electrostatic force nonlinearities. We solve the static, transient and dynamic behavior and compare the results with Finite Element solutions. Then we examine the dynamic solution of the switch under different actuation waveforms. The obtained results showed a significant reduction in actuation voltage, pull-in bandwidth and switching time.

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“…Several researchers have demonstrated that dynamic pull-in occurs in various beam-based microactuators at voltages lower than the static pull-in voltage. Gupta et al (1996) showed that microbeams can pull-in at voltages below the static pull-in voltage due to transient effects. Nielson and Barbastathis (2006) used a lumped model to solve for the pull-in voltage and range of travel by equating the electrostatic energy to the elastic energy and eliminating the velocity-dependent energy terms.…”

Section: Introductionmentioning

confidence: 99%

Dynamics and Global Stability of Beam-based Electrostatic Microactuators

Najar

Nayfeh

Abdel‐Rahman

et al. 2010

Journal of Vibration and Control

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We investigate the dynamics and global stability of a beam-based electrostatic microactuator, which is modeled as a first-order approximation of a reduced-order model (ROM) derived using the differential quadrature method (DQM). We show that the ROM dynamics is qualitatively similar to that of a higher-order approximation. We simulate the occurrence of dynamic pull-in for excitations near the first primary resonance using the finite difference method (FDM) and long-time integration. Limit-cycle solutions are obtained using the FDM, the generated frequency- and force-response curves exhibit cyclic-fold, saddle-node, and period-doubling bifurcations. We verify that symmetry breaking is not likely to occur because the orbit is already asymmetric. We identify the basin of attraction of bounded motions using various approximation levels. The simulations reveal that the erosion of the basin of attraction depends heavily on the amplitude and frequency of the AC voltage. We show that smoothness of the boundary of the basin of attraction can be lost and replaced by fractal tongues, which dramatically increase the sensitivity of the microbeam to initial conditions. According to these simulations, the locations of the two fixed points are likely to be disturbed.

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Pull-In Dynamic of electrostatically-Actuated Beams

Cited by 26 publications

References 2 publications

Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators

Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators

MEMS SPDT microswitch with low actuation voltage for RF applications

Dynamics and Global Stability of Beam-based Electrostatic Microactuators

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