No abstract

In this paper, we demonstrate how efficient loworder dynamical models for micromechanical devices can be constructed using data from a few runs of fully meshed but slow numerical models such as those created by the finiteelement method (FEM). These reduced-order macromodels are generated by extracting global basis functions from the fully meshed model runs in order to parameterize solutions with far fewer degrees of freedom. The macromodels may be used for subsequent simulations of the time-dependent behavior of nonlinear devices in order to rapidly explore the design space of the device. As an example, the method is used to capture the behavior of a pressure sensor based on the pull-in time of an electrostatically actuated microbeam, including the effects of squeeze-film damping due to ambient air under the beam. Results show that the reduced-order model decreases simulation time by at least a factor of 37 with less than 2% error. More complicated simulation problems show significantly higher speedup factors. The simulations also show good agreement with experimental data. [399]

In this paper, we describe how a few simulations of felly meshed dynamical problems cart be used to construct efficient low-order models for system-level design of microstructures. We report on the use of this method to capture the measured behavior of a pressure sensor based on the pull-in time of a beam. Results show that the reduced order model decreases simulation time by at least a factor of 37 while achieving good agreement with experimental data.