MEMS SPDT microswitch with low actuation voltage for RF applications

Samaali, Hatem; Najar, Fehmi; Ouni, Bouraoui; Choura, Slim

doi:10.1108/mi-12-2014-0055

Cited by 8 publications

(4 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Khater et al [7] demonstrated 60% voltage reduction by changing the actuation mode from static to dynamic pull-in. Samaali and Najar [24] demonstrated an important reduction of the ON state voltage of a doubly-clamped microswitch, as low as 4.5 V, when using a square waveform compared to a harmonic signal. Similarly, Naoui et al [25] demonstrated similar reductions in switching time and pull-in voltage of MEMS switches using unipolar and bipolar square waveforms compared with harmonic signal.…”

Section: Journal Of Micromechanics and Microengineeringmentioning

confidence: 99%

A square wave is the most efficient and reliable waveform for resonant actuation of micro switches

Sassi

Khater

Najar

et al. 2018

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper investigates efficient actuation methods of shunt MEMS switches and other parallel-plate actuators. We start by formulating a multi-physics model of the micro switch, coupling the nonlinear Euler–Bernoulli beam theory with the nonlinear Reynolds equation to describe the structural and fluidic domains, respectively. The model takes into account fringing field effects as well as mid-plane stretching and squeeze film damping nonlinearities. Static analysis is undertaken using the differential quadrature method (DQM) to obtain the pull-in voltage, which is verified by means of the finite element model and validated experimentally. We develop a reduced order model employing the Galerkin method for the structural domain and DQM for the fluidic domain. The proposed waveforms are intended to be more suitable for integrated circuit standards. The dynamic response of the micro switch to harmonic, square and triangular waveforms are evaluated and compared experimentally and analytically. Low voltage actuation is obtained using dynamic pull-in with the proposed waveforms. In addition, global stability analysis carried out for the three signals shows advantages of employing the square signal as the actuation method in enhancing the performance of the micro switch in terms of actuation voltage, switching time, and sensitivity to initial conditions.

show abstract

Section: Journal Of Micromechanics and Microengineeringmentioning

confidence: 99%

A square wave is the most efficient and reliable waveform for resonant actuation of micro switches

Sassi

Khater

Najar

et al. 2018

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Widespread applications of Microelectromechanical systems (MEMS) as sensors (Amiri and Kordrostami, 2018;Hwang et al, 2019;Kumar et al, 2018;Rafiee et al, 2016), switches (Samaali et al, 2015;Kim et al, 2018) and energy harvesters (Kordrostami and Roohizadegan, 2019;Kordrostami and Roohizadegan, 2018;Ghoddus et al, 2019;Ghoddus and Kordrostami, 2018) have revolutionized the technology in terms of the size of the devices (particularly the sensors) and high integration capability with electric circuits (Rafiee et al, 2017;Amiri et al, 2020). Micromachined pressure sensor is the most commonly used MEMS sensors.…”

Section: Introductionmentioning

confidence: 99%

MEMS piezoresistive pressure sensor with patterned thinning of diaphragm

Kordrostami

Hassanli

Akbarian

2020

View full text Add to dashboard Cite

Purpose The purpose of this study is to find a new design that can increase the sensitivity of the sensor without sacrificing the linearity. A novel and very efficient method for increasing the sensitivity of MEMS pressure sensor has been proposed for the first time. Rather than perforation, we propose patterned thinning of the diaphragm so that specific regions on it are thinner. This method allows the diaphragm to deflect more in response with regard to the pressure. The best excavation depth has been calculated and a pressure sensor with an optimal pattern for thinned regions has been designed. Compared to the perforated diaphragm with the same pattern, larger output voltage is achieved for the proposed sensor. Unlike the perforations that have to be near the edges of the diaphragm, it is possible for the thin regions to be placed around the center of the diaphragm. This significantly increases the sensitivity of the sensor. In our designation, we have reached a 60 per cent thinning (of the diaphragm area) while perforations larger than 40 per cent degrade the operation of the sensor. The proposed method is applicable to other MEMS sensors and actuators and improves their ultimate performance. Design/methodology/approach Instead of perforating the diaphragm, we propose a patterned thinning scheme which improves the sensor performance. Findings By using thinned regions on the diaphragm rather than perforations, the sensitivity of the sensor was improved. The simulation results show that the proposed design provides larger membrane deflections and higher output voltages compared to the pressure sensors with a normal or perforated diaphragm. Originality/value The proposed MEMS piezoelectric pressure sensor for the first time takes advantage of thinned diaphragm with optimum pattern of thinned regions, larger outputs and larger sensitivity compared with the simple or perforated diaphragm pressure sensors.

show abstract

“…Seyedi et al (2015) proposed content addressable memory component using NEM switches and CMOS transistors to realize the translation lookaside buffers with 16 nm technology works at 2 GHz for accessing data and instructions to complete the search operation within one clock cycle. Samaali et al (2015) reported mathematical modeling and finite element method solution for electrostatic-based single pole double throw switch (SPDT) micro switch used in a wireless sensor. The logic gates reported in literature works in the range of 0V to 40V, involves more NEMS switches with complex structures too.…”

Section: Introductionmentioning

confidence: 99%

Design and simulation of electrostatic NEMS logic gates

Pandiyan

Uma

Umapathy

2018

COMPEL

View full text Add to dashboard Cite

Purpose This paper aims to present a design and simulation of electrostatic nanoelectromechanical system (NEMS)-based logic gates using laterally actuated cantilever with double-electrode structure that can implement logic functions, similar to logic devices that are made of solid-state transistors which operates at 5 V. Design/methodology/approach The analytical modeling of NEMS switch is carried out for finding the pull-in and pull-out voltage based on Euler-Bernoulli’s beam theory, and its numerical simulation is performed using finite element method computer-aided design tool COVENTORWARE. Findings This paper reports analytical and numerical simulation of basic NEMS switch to realize the logic gates. The proposed logic gate operates on 5 V which suits well with conventional complementary metal oxide semiconductor (CMOS) logic which in turn reduces the power consumption of the device. Originality/value The proposed logic gates use a single bit NEMS switch per logic instead of using 6-14 individual transistors as in CMOS. One exclusive feature of this proposed logic gates is that the basic NEMS switch is structurally modified to function as specific logic gates depending upon the given inputs.

show abstract

MEMS SPDT microswitch with low actuation voltage for RF applications

Cited by 8 publications

References 22 publications

A square wave is the most efficient and reliable waveform for resonant actuation of micro switches

A square wave is the most efficient and reliable waveform for resonant actuation of micro switches

MEMS piezoresistive pressure sensor with patterned thinning of diaphragm

Design and simulation of electrostatic NEMS logic gates

Contact Info

Product

Resources

About