A square wave is the most efficient and reliable waveform for resonant actuation of micro switches

Abstract

This paper investigates efficient actuation methods of shunt MEMS switches and other parallel-plate actuators. We start by formulating a multi-physics model of the micro switch, coupling the nonlinear Euler–Bernoulli beam theory with the nonlinear Reynolds equation to describe the structural and fluidic domains, respectively. The model takes into account fringing field effects as well as mid-plane stretching and squeeze film damping nonlinearities. Static analysis is undertaken using the differential quadrature method (DQM) to obtain the pull-in voltage, which is verified by means of the finite element model and validated experimentally. We develop a reduced order model employing the Galerkin method for the structural domain and DQM for the fluidic domain. The proposed waveforms are intended to be more suitable for integrated circuit standards. The dynamic response of the micro switch to harmonic, square and triangular waveforms are evaluated and compared experimentally and analytically. Low voltage actuation is obtained using dynamic pull-in with the proposed waveforms. In addition, global stability analysis carried out for the three signals shows advantages of employing the square signal as the actuation method in enhancing the performance of the micro switch in terms of actuation voltage, switching time, and sensitivity to initial conditions.

Parametric resonance of bi-directional axial loads shallow arch microresonators

“…3 c u and c w are the damping coefficients accounting for linear viscous damping and squeeze film damping, given by [7,41]…”

“…However, the observed amplitude is qualitatively acceptable but quantitatively different. The reason for this difference can be attributed first to the misrepresentation of the squeeze film damping model, obtained from the Reynolds equation [41], when high excitation frequencies and amplitudes are applied, generating large squeeze parameter and increasing the Reynolds and Knudsen numbers [7]. In this case, Navier-Stokes equation with slipflow boundary conditions or Boltzmann equations should be used [50,51].…”

“…Therefore, innovative design improvements were proposed [3][4][5][6][7][8][9][10][11][12][13][14][15] and some of these suggest using shallow arched microbeam. Shallow arched beams have been widely used in numerous engineering structures [16,17].…”

Energy harvesting using a clamped–clamped piezoelectric–flexoelectric beam

“…These mode shapes are used in a Galerkin procedure to obtain a reduced order model of the governing equations. For a single mode approximation, we consider the following expressions [33]:…”

A Stochastic Deterioration Process Based Approach for Micro Switches Remaining Useful Life Estimation

“…Specifically, they are important parts of rail vehicle systems, and whether they are damaged is related to the operation of the entire system or even the safety of the passengers. Due to the significance of such aspect, several research works dealing with the reliability of micro-switches and other electronic components have been published, such as references [4][5][6][7][8][9]. Nevertheless, traditional approaches to estimate remaining useful life (RUL) have failed because of the reliance on average accumulated historical field data [10].…”