2018
DOI: 10.1108/compel-12-2016-0544
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Design and simulation of electrostatic NEMS logic gates

Abstract: Purpose This paper aims to present a design and simulation of electrostatic nanoelectromechanical system (NEMS)-based logic gates using laterally actuated cantilever with double-electrode structure that can implement logic functions, similar to logic devices that are made of solid-state transistors which operates at 5 V. Design/methodology/approach The analytical modeling of NEMS switch is carried out for finding the pull-in and pull-out voltage based on Euler-Bernoulli’s beam theory, and its numerical simul… Show more

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