Design and simulation of piezoelectric MEMS logic gates

Pandiyan, P.; Sujan, Y.; Raju, Saraswati

doi:10.1080/00150193.2022.2149306

Cited by 1 publication

(1 citation statement)

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“…The capacitance ratio is typically measured experimentally using impedance analyzers or network analyzers. By applying a voltage or a test signal and measuring the resulting capacitance in both the "on" and "off" states, the capacitance ratio can be determined [64][65][66][67]. In summary, the capacitance ratio is a key parameter in the design and evaluation of MEMS switches.…”

Section: Capacitance Ratiomentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Capacitance Ratiomentioning

confidence: 99%