Properties of Al-doped ZnO thin film sputtered from powder compacted target

Influence of deposition temperature on structural, optical and electrical properties of sputtered Al doped ZnO thin films

“…This result is in agreement with earlier report [26]. The preferred orientation is due to the lowest surface free energy for (0 0 2) plane [27][28][29]. In addition to the fact that intensity increases, we also observe that the (0 0 2) and (0 0 4) peak positions show a shift (inset Fig.…”

Comparison of various sol–gel derived metal oxide layers for inverted organic solar cells

“…Conductivity increases from 2.12 Â 10 À 3 to 2.35 Â 10 À 3 S/cm with an increase in the Al concentration from 0.5 to 1.0 at%, and then drops to 2.06 Â 10 À 3 S/cm at 2.0 at%. Such trends are not unusual and are frequently interpreted as a neutralization of the dopant atom [17,[27][28][29][30]33]. The annealing temperature has a much stronger influence on the conductivity due to recrystallization of the films.…”

“…It is well-known that AZO thin films are highly textured with the c-axis perpendicular to the substrate surface, especially in the (0 0 2) orientation. This (0 0 2) preferred orientation is due to the minimal surface energy, which the hexagonal structure (c-plane to the ZnO crystallites) corresponds to the densest packed plane [28][29][30]. If Al 3 þ ions only substitute Zn 2 þ ions, the lattice parameter of AZO crystals decreases and the (0 0 2) peak shifts to higher 2y value due to the smaller radius of Al 3 þ ions (0.53Å) compared to Zn 2 þ ions (0.75Å) [28].…”

AZO/Ag/AZO multilayer films prepared by DC magnetron sputtering for dye-sensitized solar cell application

“…Multilayer films were prepared by DC magnetron sputtering on glass substrates without heating of glass. The glass substrates were cleaned by ultrasonic cleaner for 1 h in acetone, ethanol and distilled water, respectively [10]. The sputtering chamber was pumped down below than 5.0 Â 10 À5 torr and the sputtering processes were performed at Ar pressure of 5.0 Â 10 À3 torr.…”