Process and realization of a three-dimensional gold electroplated antenna on a flexible epoxy film for wireless micromotion system

Abstract

The process and realization of a light and low resistive antenna for wireless communications by inductive coupling at 13.56 MHz is presented. The antenna is realized on an insulated substrate made of SU-8 resist in order to prevent the losses due to eddy currents from occurring and to strongly decrease its weight. The conductor is obtained by electroplating 24 m of gold in a mold of AZ-4562 resist. A Q factor of 29 has been obtained with a maximum of 37 at 19 MHz, for antenna dimensions of 1.5ϫ1.5 cm 2 . This antenna is the key component for a wireless power supplied microrobot.

Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling

“…Finally, the mold is removed, the seed layer of nickel is etched by nitric acid, and the SU-8 film is separated from the silicon using hydrofluoric acid (HF). The details of the process can be found in [31].…”

Micro-fabrication of high-thickness spiral inductors for the remote powering of implantable biosensors

“…Thick electroplated inductors on SU8 flexible substrate [6] and silicon [7,8] have been proposed. In these works, the coil thickness does not exceed 24 lm.…”

Removal of Gold Oxide by Low-Temperature Hydrogen Annealing for Microelectromechanical System Device Fabrication

“…1) Various types of MEMS device have been fabricated by this process, in which gold electroplating on a gold surface is exposed to reactive oxygen for resist ashing or sacrificial-layer etching. [2][3][4][5][6][7][8][9] In such electroplating, there are incubation periods during which the gold oxide formed by the exposure to reactive oxygen disappears, and different incubation periods at different places give rise to nonuniform film thickness. [10][11][12] This is because oxidation easily occurs when a gold surface is exposed in highly reactive chemical environments, such as exposure to oxygen plasma or a combination of ultraviolet light and ozone (UV/ozone).…”