2014
DOI: 10.1016/j.mee.2013.07.016
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Micro-fabrication of high-thickness spiral inductors for the remote powering of implantable biosensors

Abstract: a b s t r a c tA micro-fabrication process is proposed to realize high-thickness spiral inductors for the remote powering of implantable biosensors through inductive link. The process is suitable for different substrates, such as silicon and Pyrex, and enables the fabrication of the receiving inductor directly on the implantable system. The use of Ordyl Alpha960 is explored to achieve high-thickness structures. Ordyl is a dry film, negative photoresist that enables high-thickness mold (starting from 60 lm) wit… Show more

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Cited by 9 publications
(4 citation statements)
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“…As an aromatic epoxide polymer, cured SU-8 has good thermal and chemical stability, which may or may not be advantageous depending on the application. In particular, copper, which has become an increasingly popular alternative to aluminum for IC connections, can be damaged by strong acids or high temperatures used to remove SU-8, in which case, an acrylate-based negative photoresist such as Ordyl (Elga Europe, Italy) or DiaPlate (HTP, Switzerland) may be preferred because it can be stripped fairly mildly with 3% NaOH at 50 °C …”
Section: Vat Photopolymerizationmentioning
confidence: 99%
“…As an aromatic epoxide polymer, cured SU-8 has good thermal and chemical stability, which may or may not be advantageous depending on the application. In particular, copper, which has become an increasingly popular alternative to aluminum for IC connections, can be damaged by strong acids or high temperatures used to remove SU-8, in which case, an acrylate-based negative photoresist such as Ordyl (Elga Europe, Italy) or DiaPlate (HTP, Switzerland) may be preferred because it can be stripped fairly mildly with 3% NaOH at 50 °C …”
Section: Vat Photopolymerizationmentioning
confidence: 99%
“…The maximum Q value was 45.77. In Switzerland in 2014, Jacopo Olivo et al [77] created an inductor coil that can be used in implantable biosensors (Figure 5). The inductor is 14.88 mm × 2 mm in size and is backed by 525 µm of silicon with a 1-um silicon dioxide layer.…”
Section: Three Types Of Micro Metal Coils Based On Mems Technology (1...mentioning
confidence: 99%
“…Olivo et al tested by micro-fabrication high-thickness spiral inductors for the remote powering of implantable biosensors through inductive link. These inductors enabled bidirectional data communication with the external transmitter [127]. Luo et al successfully designed and microfabricated a RF wireless LC resonant pressure sensor completely made of biodegradable materials.…”
Section: Data Communicationmentioning
confidence: 99%