Principles of Meniscus-Based MEMS Gas or Liquid Pressure Sensors

Suter, Jonathan D.; Hohimer, Cameron J.; Fricke, J.; Christ, Josef F.; Kim, Hanseup; Evans, Allan T.

doi:10.1109/jmems.2013.2239258

Cited by 15 publications

(13 citation statements)

References 29 publications

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“…The capacitive-type sensors have been developed and studied for many years due to their advantages, which include high resolution, a robust structure and lower power consumption than sensors using piezoresistive effects [1]- [5]. Enhancement of sensor design with complex fabrication techniques makes it more difficult to adapt to new applications, as changes to any geometry layer affect the mechanical properties of the sensor [6].…”

Section: Introductionmentioning

confidence: 99%

One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

Nawi¹,

Manaf²,

Rahman³

et al. 2015

IEEE Sensors J.

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This paper presents the development of a novel one-side-electrode-type fluidic-based capacitive pressure sensor. A pressure sensor using a one-side-electrode and an implementation of electrical double layer capacitance concept was proposed. Mechanical analysis of the membrane was carried out using the finite-element analysis in terms of deflection and Mises stress. A sensor with a circular membrane radius of 3.2 mm, membrane thickness of 0.8 mm, microchannel thickness of 0.5 mm, and microchannel width of 0.5 mm was fabricated using polydimethylsiloxane. The validation was made between the analytical and experimental results for fluid mechanisms inside the sensor. This showed that the displacement for all types of liquid, including methanol, ethanol, and silicon oil was linearly aligned. Methanol was chosen as an electrolyte due to its liquid properties, such as low surface tension and dielectric permittivity. From the experimental results, the operating frequency, response time, and sensitivity of the sensor were 1.2 kHz, 0.12 s, and 0.77 pF/kPa, respectively. The effects of vibration, temperature, and lifetime were also discussed in this paper.Index Terms-Capacitive pressure sensor, electrical double layer, PDMS, electrolyte.

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Section: Introductionmentioning

confidence: 99%

One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

Nawi¹,

Manaf²,

Rahman³

et al. 2015

IEEE Sensors J.

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“…But hydrogen evolved from electrolysis can be gradually absorbed on the surface of transition metals . Some groups have obtained long lifetime of trapped air by employing sealing schemes . We propose that the disappearance rate of the trapped gas is a combination of the chemical activity of the gas, the property of the sealing material, and the dissolution rate of the gas in the liquid.…”

Section: Resultsmentioning

confidence: 99%

Ultraminiature and Flexible Sensor Based on Interior Corner Flow for Direct Pressure Sensing in Biofluids

Tang

Hong

Wang

et al. 2019

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Conventional pressure sensing devices are well developed for either indirect evaluation or internal measuring of fluid pressure over millimeter scale. Whereas, specialized pressure sensors that can directly work in various liquid environments at micrometer scale remain challenging and rarely explored, but are of great importance in many biomedical applications. Here, pressure sensor technology that utilizes capillary action to self‐assemble the pressure‐sensitive element is introduced. Sophisticated control of capillary flow, tunable sensitivity to liquid pressure in various mediums, and multiple transduction modes are realized in a polymer device, which is also flexible (thickness of 8 µm), ultraminiature (effective volume of 18 × 100 × 580 µm3), and transparent, enabling the sensor to work in some extreme situations, such as in narrow inner spaces (e.g., a microchannel of 220 µm in width and 100 µm in height), or on the surface of small objects (e.g., a 380 µm diameter needle). Potential applications of this sensor include disposables for in vivo and short‐term measurements.

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“…As shown in Figure 1(b), the surrounding in vivo environment causes an additional capacitance called as parasitic capacitance which can cause a large error in the relationship between force and the measured capacitance value. In fact, parasitic capacitance in water or tissue can be several times as large as the nominal capacitance due to force for a conventional capacitive sensor ([5]–[7]). Due to the existence of the fringe electric field around the electrodes, parasitic noise is inevitable in these conventional sensors.…”

Section: Introductionmentioning

confidence: 99%

Novel Supercapacitor-Based Force Sensor Insensitive to Parasitic Noise

2017

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Traditional capacitive sensors suffer from significant parasitic noise when used in liquid environments or inside the human body. The parasitic noise overwhelms the force response of the sensor and makes it impossible to calculate the absolute force experienced by the sensor. This article focuses on the development of a supercapacitor based force sensor that is immune to parasitic noise. The supercapacitor consists of co-planar electrodes and a solid state ionic gel electrolyte on a deformable membrane. Force exertion causes deformation of the electrolyte membrane, increases its area of contact with the electrodes, resulting in a change of capacitance. The sensor is sealed, waterproof, and shows absolutely no changes in capacitance when immersed in water or enclosed in extracted sheep tissue. At the same time, its force sensitivity of 0.13 μ F/N exceeds the 0.3 pF/N sensitivity of a traditional capacitive sensor by 6 orders of magnitude. The developed sensor could have many biomedical applications in which parasitic capacitance is a serious challenge.

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Principles of Meniscus-Based MEMS Gas or Liquid Pressure Sensors

Cited by 15 publications

References 29 publications

One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

Ultraminiature and Flexible Sensor Based on Interior Corner Flow for Direct Pressure Sensing in Biofluids

Novel Supercapacitor-Based Force Sensor Insensitive to Parasitic Noise

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