Polymer micromachining for micro- and nanophotonics

Cristea, Dana; Obreja, P.; Kusko, Mihaela; Manea, E.; Rebigan, R.

doi:10.1016/j.msec.2005.09.010

Cited by 26 publications

(13 citation statements)

References 14 publications

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“…Using this hardmask, poor surface roughness of both the exposed and non-exposed PDMS parts was observed. The exposed PDMS was deteriorated by resputtering the aluminum-masking layer, and excessive wrinkling could be seen on the masked PDMS because of a mismatch in the thermal expansion coefficient, as reported by Cristea et al 13 . In another approach, normal photoresists were used as a masking layer 11,26 .…”

Section: Methodssupporting

confidence: 52%

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SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

et al. 2016

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Over the past few decades, polydimethylsiloxane (PDMS) has become the material of choice for a variety of microsystem applications, including microfluidics, imprint lithography, and soft microrobotics. For most of these applications, PDMS is processed by replication molding; however, new applications would greatly benefit from the ability to pattern PDMS films using lithography and etching. Metal hardmasks, in conjunction with reactive ion etching (RIE), have been reported as a method for patterning PDMS; however, this approach suffers from a high surface roughness because of metal redeposition and limited etch thickness due to poor etch selectivity. We found that a combination of LOR and SU8 photoresists enables the patterning of thick PDMS layers by RIE without redeposition problems. We demonstrate the ability to etch 1.5-μm pillars in PDMS with a selectivity of 3.4. Furthermore, we use this process to lithographically process flexible fluidic microactuators without any manual transfer or cutting step. The actuator achieves a bidirectional rotation of 50°at a pressure of 200 kPa. This process provides a unique opportunity to scale down these actuators as well as other PDMS-based devices.

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Section: Methodssupporting

confidence: 52%

“…However, the aluminum and gold hardmasks that are used cause high surface roughness, most likely by re-sputtering the etch mask material 12 and a mismatch in the thermal expansion coefficient between PDMS and the metal mask 13 .…”

Section: Introductionmentioning

confidence: 99%

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

et al. 2016

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“…The refractive index of virgin PVA was found to be around 1.49 owing to its transparent nature. 22 The refractive index of COE was observed to be 1.36. It is noticed that the blends prepared by the microwave method exhibit higher refractive index as compared to the blends prepared by the conventional method.…”

Section: Refractive Index Studiesmentioning

confidence: 98%

Effect of microwave processing on the spectral, mechanical, thermal, and morphological characteristics of sustainable resource based castor oil Epoxy/PVA blends

Ahmad

Riaz

2011

Adv Polym Technol

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ABSTRACT:In recent years, the development of ecofriendly biodegradable packaging materials from natural polymers particularly agricultural products has received increasing attention in an attempt to substitute the existing nonbiodegradable petro-based polymers. The need for new polymeric materials with tailored properties has driven the interest of industry and academia toward polymer blends. Vegetable oils are known to possess varying amounts of triglycerides having different unsaturation in their chains. Blending of commercial polymers with vegetable oil derived polymers is, therefore, expected to show synergetic behavior in terms of compatibility, physical, and mechanical characteristics with the latter. In an attempt to develop a biodegradable packaging material, blends of poly(vinyl alcohol) (PVA) and castor oil epoxy (COE) were synthesized in the weight ratios of 70/30, 60/40, 50/50, 40/60, and

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“…Study of interaction of lasers with polymer materials that induce surface modification and ablation has been an interesting topic for decades [1]. Polymeric materials have been used in various applications such as high-performance photonics devices and engineering applications such as micro/nanofluidics channel fabrication, micromachining/microdrilling [2,3], splitters, waveguide gratings and filters, and also in optical waveguide fabrication [3][4][5]. One of the most significance in the research field of photonics is refractive index modification of germanium-doped silica glass using 244 nm UV-laser irradiation as well as stud-ies on nonlinear refractive index change of glass by femtosecond laser irradiation [6].…”

Section: Introductionmentioning

confidence: 99%

Surface Modification of Polymer Materials Induced by Laser Irradiation

Zakaria¹

2016

Applications of Laser Ablation - Thin Film Deposition, Nanomaterial Synthesis and Surface Modification

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We report on the surface modification effects using allyl-diglycol CR39 polymer induced by laser irradiation at 157 nm F 2 laser (VUV) and 248 nm KrF laser. The motivation is to investigate the ablation effects on this polymer in optical waveguides application the ablation effects on this polymer in optical waveguides. Fabrication of waveguides has been observed using continuous wave (CW) at 244 nm argon ion laser. Ablation effects on the surface of this polymer have been characterized including ablation threshold at different wavelengths from the assorted depth of craters formed from UV pulsed laser. Application of this polymer in optical waveguide application is corroborated by the refractive index value on the CR39 channels that varied as fluences changed when using the continuous wave UV irradiation. A limit for upper fluence at the point where laser ablation originates on this polymer has also been determined.

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Polymer micromachining for micro- and nanophotonics

Cited by 26 publications

References 14 publications

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

Effect of microwave processing on the spectral, mechanical, thermal, and morphological characteristics of sustainable resource based castor oil Epoxy/PVA blends

Surface Modification of Polymer Materials Induced by Laser Irradiation

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