The 20th century's robotic systems have been made from stiff materials, and much of the developments have pursued ever more accurate and dynamic robots, which thrive in industrial automation, and will probably continue to do so for decades to come. However, the 21st century's robotic legacy may very well become that of soft robots. This emerging domain is characterized by continuous soft structures that simultaneously fulfill the role of robotic link and actuator, where prime focus is on design and fabrication of robotic hardware instead of software control. These robots are anticipated to take a prominent role in delicate tasks where classic robots fail, such as in minimally invasive surgery, active prosthetics, and automation tasks involving delicate irregular objects. Central to the development of these robots is the fabrication of soft actuators. This article reviews a particularly attractive type of soft actuators that are driven by pressurized fluids. These actuators have recently gained traction on the one hand due to the technology push from better simulation tools and new manufacturing technologies, and on the other hand by a market pull from applications. This paper provides an overview of the different advanced soft actuator configurations, their design, fabrication, and applications.

The development of MEMS actuators is rapidly evolving and continuously new progress in terms of efficiency, power and force output is reported. Pneumatic and hydraulic are an interesting class of microactuators that are easily overlooked. Despite the 20 years of research, and hundreds of publications on this topic, these actuators are only popular in microfluidic systems. In other MEMS applications, pneumatic and hydraulic actuators are rare in comparison with electrostatic, thermal or piezo-electric actuators. However, several studies have shown that hydraulic and pneumatic actuators deliver among the highest force and power densities at microscale. It is believed that this asset is particularly important in modern industrial and medical microsystems, and therefore, pneumatic and hydraulic actuators could start playing an increasingly important role. This paper shows an in-depth overview of the developments in this field ranging from the classic inflatable membrane actuators to more complex piston-cylinder and drag-based microdevices.

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