Performance of Nano-Electromechanical Systems as Nanoparticle Position Sensors

Orhan, Ezgi; Yüksel, Mert; Arı, Atakan B.; Yanik, Cenk; Hatipoglu, Utku; Yagci, Ahmet M.; Hanay, M. Selim

doi:10.3389/fmech.2020.00037

Cited by 5 publications

(6 citation statements)

References 38 publications

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“…As a potential friction modifying agent including carbides, nitrides, metals, and various ceramics, many nanostructure and nanoscale coating materials were proposed. The following subsection will focus on two major parts in aviation: the airframe structure and aero-body and engine for their properties and applications [5][6][7][8].…”

Section: Enms Properties and Applicationsmentioning

confidence: 99%

Engineered Nanomaterials for Aviation Industry in COVID-19 Context: A Time-Sensitive Review

et al. 2021

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Engineered nanomaterials (ENMs) are catalyzing the Industry 4.0 euphoria in a significant way. One prime beneficiary of ENMs is the transportation industry (automotive, aerospace, rail car), where nanostructured multi-materials have ushered the path toward high-strength, ultra-impact-resistant, lightweight, and functionally graded engineered surfaces/components creation. The present paper aims to extrapolate much-needed ENMs knowledge from literature and its usage in the aviation industry, highlighting ENMs contribution to aviation state-of-the-art. Topics such as ENMs classification, manufacturing/synthesis methods, properties, and characteristics derived from their utilization and uniqueness are addressed. The discussion will lead to novel materials’ evolving need to protect aerospace surfaces from unfolding SARS-COVID-19 and other airborne pathogens of a lifetime challenge.

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Section: Enms Properties and Applicationsmentioning

confidence: 99%

Engineered Nanomaterials for Aviation Industry in COVID-19 Context: A Time-Sensitive Review

et al. 2021

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“…A graphene-based pressure sensor is attractive for the aircraft industry, that is because this sensor has a small footprint and weight. NEMS as mass sensors have innumerable applications such as volatile organic biomarker detection ,single cell characterization, and single molecule mass spectrometry [21]. It has been found that many types of MEMS sensors based on different sensing principles such as temperature, humidity, pressure, inertial forces, chemical species, gases, magnetic fields, radiation, biomedical species, etc.…”

Section: Mems/nems Device Applicationsmentioning

confidence: 99%

Advances in Graphene Based MEMS and Nems Devices: Materials, Fabrication, and Applications

Saipriya¹,

Deekshitha²,

Shreya³

et al. 2022

ECS Trans.

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Microelectromechanical systems (MEMS) are generally known as miniaturized mechanical and electro-mechanical systems, whereas NEMS stands for nanoelectromechanical systems. Graphene is an atomically thin material that features unique properties, such as high carrier mobility, high mechanical strength, and piezoresistive electromechanical transduction, which makes it an extremely promising material for future MEMS and NEMS devices. Design and fabrication of MEMS/NEMS devices using graphene process includes trench etching, wafer backside etching, graphene transfer, and mass release, which are described in a comprehensive manner. This review provides interesting perspectives for lock-in detection of weak fluorescent signals, NEMS position detection, electromechanical control of the on-chip transmitter, and single-photon-level fast electromechanical optical modulation. There are various applications of MEMS/NEMS devices, namely radio frequency devices, optic NEMS, pressure sensors, inertial sensors, which have been discussed in detail. The review mainly focusses on the devices made up of graphene (atom-layer distance of ~0.335 nm) as a main electronic/mechanical material due to its remarkable mechanical and electrical (Young’s modulus of up to ~1 TPa cm2Vs-1) and charge-carrier mobility of up to 200,000, which makes it an extremely promising membrane and transducer material for MEMS/NEMS system applications. Modern MEMS/NEMS experiments utilize mechanical resonators to push the bounds of force and mass sensing, demonstrate novel electromechanical circuit applications, measure the structural properties of materials are also covered in this review.

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“…A new type of MS technology based on nano-electromechanical sensors (NEMS) is emerging that allows charge-independent mass analysis in the mega- to giga-Dalton (∼attogram to femtogram) range. − NEMS are resonating nanostructures made of silicon or other materials, which respond to properties of individual particles accreting onto their active surface through changes in their resonance frequencies. NEMS resonance frequencies can in theory be sensitive to particle mass, position, stiffness or even shape, depending on the resonator’s dimensions, geometry, and mode of vibration. , However, contingencies associated with the measurement of multiple resonance frequencies have so far precluded the experimental evidence of effects beyond that of stiffness. , Devices used in the present study are sensitive to mass and position, and largely insensitive to particle stiffness . NEMS-MS technology has specific advantages over ICP-MS and CDMS, such as its ability to characterize the inertial mass of intact individual particles, regardless of their elemental composition or ionization efficiency.…”

Section: Introductionmentioning

confidence: 99%

“…20,21 However, contingencies associated with the measurement of multiple resonance frequencies have so far precluded the experimental evidence of effects beyond that of stiffness. 21,22 Devices used in the present study are sensitive to mass and position, and largely insensitive to particle stiffness. 19 NEMS-MS technology has specific advantages over ICP-MS and CDMS, such as its ability to characterize the inertial mass of intact individual particles, regardless of their elemental composition or ionization efficiency.…”

Section: ■ Introductionmentioning

confidence: 99%

Characterizing Nanoparticle Mass Distributions Using Charge-Independent Nanoresonator Mass Spectrometry

et al. 2022

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Due to their unique size-dependent properties, nanoparticles (NPs) have many industrial and biomedical applications. Although NPs are generally characterized based on the size or morphological analysis, the mass of whole particles can be of interest as it represents the total amount of material in the particle regardless of shape, density, or elemental composition. In addition, the shape of nonspherical NPs presents a conceptual challenge, making them difficult to characterize in terms of size or morphological characteristics. Here, we used a novel nano-electro-mechanical sensor mass spectrometry (NEMS-MS) technology to characterize the mass distributions of various NPs. For standard spherical gold NPs, mass distributions covered the range from ∼5 to 250 MDa (8 to ∼415 attograms). Applying the density of gold (19.3 g/cm3) and assuming perfect sphericity, these mass measurements were used to compute the equivalent diameters of the NPs. The sizes determined agreed well with the transmission electron microscopy (TEM) imaging data, with deviations of ∼1.4%. Subsequently, we analyzed the mass distribution of ∼50 nm synthetic silicon dioxide particles, having determined their size by electron microscopy (SEM and TEM). Their estimated density was in line with the literature values derived from differential mobility analyzer and aerosol particle mass analyzer data. Finally, we examined the intact gold nanotetrapods and obtained a mass distribution revealing their controlled polydispersity. The presence of polyethylene glycol coating was also quantified and corroborated nuclear magnetic resonance observations. Our results demonstrate the potential of NEMS-MS-based measurements as an effective means to characterize NPs, whatever their composition, shape or density.

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Performance of Nano-Electromechanical Systems as Nanoparticle Position Sensors

Cited by 5 publications

References 38 publications

Engineered Nanomaterials for Aviation Industry in COVID-19 Context: A Time-Sensitive Review

Engineered Nanomaterials for Aviation Industry in COVID-19 Context: A Time-Sensitive Review

Advances in Graphene Based MEMS and Nems Devices: Materials, Fabrication, and Applications

Characterizing Nanoparticle Mass Distributions Using Charge-Independent Nanoresonator Mass Spectrometry

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