We study the spectral properties of the thermal force giving rise to the Brownian motion of a continuous mechanical system -namely, a nanomechanical beam resonator -in a viscous liquid. To this end, we perform two separate sets of experiments. First, we measure the power spectral density (PSD) of the position fluctuations of the resonator around its fundamental mode at its center. Then, we measure the frequency-dependent linear response of the resonator, again at its center, by driving it with a harmonic force that couples well to the fundamental mode. These two measurements allow us to determine the PSD of the Brownian force noise acting on the structure in its fundamental mode. The PSD of the force noise extracted from multiple resonators spanning a broad frequency range displays a "colored spectrum". Using a single-mode theory, we show that, around the fundamental resonances of the resonators, the PSD of the force noise follows the dissipation of a blade oscillating in a viscous liquid -by virtue of the fluctuation-dissipation theorem.

Nanoelectromechanical Systems (NEMS) have emerged as a promising technology for performing the mass spectrometry of large biomolecules and nanoparticles. As nanoscale objects land on NEMS sensor one by one, they induce resolvable shifts in the resonance frequency of the sensor

Buckling of mechanical structures results in bistable states with spatial separation, a feature desirable for sensing, shape configuration, and mechanical computation. Although different approaches have been developed to access buckling at microscopic scales, such as heating or prestressing beams, little attention has been paid so far to dynamically control all the parameters critical for the bifurcation-the compressive stress and the lateral force on the beam. Here, we develop an all-electrostatic architecture to control the compressive force, as well as the direction and amount of buckling, without significant heat generation on micro-or nanostructures. With this architecture, we demonstrated fundamental aspects of device function and dynamics. By applying voltages at any of the digital electronics standards, we have controlled the direction of buckling. Lateral deflections as large as 12% of the beam length were achieved. By modulating the compressive stress and lateral electrostatic force acting on the beam, we tuned the potential energy barrier between the postbifurcation stable states and characterized snap-through transitions between these states. The proposed architecture opens avenues for further studies in actuators, shape-shifting devices, thermodynamics of information, and dynamical chaos.

Piezoresistive strain gauges allow for electronic readout of mechanical deformations with high fidelity. As piezoresistive strain gauges are aggressively being scaled down for applications in nanotechnology, it has become critical to investigate their physical attributes at different limits. Here, we describe an experimental approach for studying the piezoresistive gauge factor of a gold thin-film nanoresistor as a function of frequency. The nanoresistor is fabricated lithographically near the anchor of a nanomechanical doubly clamped beam resonator. As the resonator is driven to resonance in one of its normal modes, the nanoresistor is exposed to frequency-dependent strains of ε ≲ 10 −5 in the 4−36 MHz range. We calibrate the strain using optical interferometry and measure the resistance changes using a radio frequency mix-down technique. The piezoresistive gauge factor γ of our lithographic gold nanoresistors is γ ≈ 3.6 at 4 MHz, in agreement with comparable macroscopic thin metal film resistors in previous works. However, our γ values increase monotonically with frequency and reach γ ≈ 15 at 36 MHz. We discuss possible physics that may give rise to this unexpected frequency dependence.

Nanoelectromechanical systems provide ultrahigh performance in sensing applications. The sensing performance and functionality can be enhanced by utilizing more than one resonance mode of a nanoelectromechanical-systems device. However, it is often challenging to measure mechanical modes at high frequencies or modes that couple weakly to output transducers. In this paper, we propose the use of intermodal coupling as a mechanism to enable the detection of such modes. To implement this method, a probe mode is continuously driven and monitored using a phase-locked loop, while an auxiliary drive signal scans for other modes. Each time the auxiliary drive signal excites the corresponding mode by matching the mechanical frequency, the effective tension within the structure increases, which in turn causes a frequency shift in the probe mode. The location and width of these frequency shifts can be used to determine the frequency and quality factor of mechanical modes indirectly. Intermodal coupling can be used as a tool to obtain the spectrum of a mechanical structure even if some of these modes cannot be detected conventionally.

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Here, we study the acoustic radiation generated by the vibration of miniaturized doubly clamped and cantilever beam resonators in viscous fluids. Acoustic radiation results in an increase in dissipation and consequently a decrease in the resonator’s quality factor. We find that dissipation due to acoustic radiation is negligible when the acoustic wavelength in the fluid is much larger than the bending wavelength. In this regime, dissipation is primarily due to the viscous losses in the fluid and may be predicted with the two-dimensional cylinder approximation in the absence of axial flow and substrate effects. In contrast, when the bending wavelength approaches the length of the acoustic wavelength, acoustic radiation becomes prominent. In this regime, dissipation due to acoustic radiation can no longer be neglected, and the cylinder approximation inaccurately characterizes the total energy loss in the system. Experiments are performed with microcantilevers of varying lengths in Ar and N2 to observe trends in the acoustic wavelength of the fluid and bending wavelength. Additional experimental results from doubly clamped nanoelectromechanical system beams are also presented. Experimental results illustrate an increase in dissipation, which is further analyzed with the use of three-dimensional finite element models. With the numerical simulations, we calculate the radiation efficiency of the measured devices and analyze the pressure fields generated by the vibrating resonators. This analysis allows one to estimate the effects of acoustic radiation for any resonator.