2021
DOI: 10.1103/physrevfluids.6.024201
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Nanoflows induced by MEMS and NEMS: Limits of two-dimensional models

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Cited by 10 publications
(12 citation statements)
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“…These predictions match well with our experimental data for frequencies 2.5 MHz. The measured k I deviates from theory at low frequency because of the added squeeze damping 20 .…”
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confidence: 56%
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“…These predictions match well with our experimental data for frequencies 2.5 MHz. The measured k I deviates from theory at low frequency because of the added squeeze damping 20 .…”
mentioning
confidence: 56%
“…NEMS-based detection of individual atoms and molecules 7,8 , single charge quanta 9,10 , and vibrations of single microorganisms 11,12 has established the potential of NEMS sensors. NEMS are also at the forefront of fundamental physical science, opening up studies in quantum mechanics 13 , optomechanics 14 , Brownian motion 15,16 , fluid mechanics [17][18][19][20] , and nanoelectronics [21][22][23][24] .…”
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confidence: 99%
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“…Both bodies of water are modeled as viscous compressible Newtonian fluids, and the diameter of the surrounding water sphere is chosen as 100 µm such that all viscous and thermal losses can be captured within the model [Fig. 12(b)] [87]. A pre-stressed eigenfrequency study is used, which consists of a stationary solver followed by an eigenfrequency solver.…”
Section: Temperature Increase Due To Joule Heatingmentioning
confidence: 99%
“…5,6 NEMS-based detection of individual atoms and molecules, 7,8 single charge quanta, 9,10 and vibrations of single microorganisms 11,12 has established the potential of NEMS sensors. NEMS are also at the forefront of fundamental physical science, opening up studies in quantum mechanics, 13 optomechanics, 14 Brownian motion, 15,16 fluid mechanics, [17][18][19][20] and nanoelectronics. [21][22][23][24] In a typical implementation, 25 one actuates linear oscillations of the NEMS resonator using a force transducer and looks for changes in the phase, frequency, or dissipation due to interactions.…”
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confidence: 99%