Optimization of diffractive MEMS for optical switching

Abstract

Diffractive Micro-Electro-Mechanical Systems (D-MEMS) have enjoyed increased attention in the fields of communication, spectroscopy, projection display, and maskless lithography. Redirecting an optical signal into predefined angles, precisely balancing this optical signal, inherent wavelength filtering capability and high switching speed are some of the advantages over other optical MEMS. D-MEMS based on customized IC fabrication processes are being used to assemble system-level architectures for integration into mainstream circuitry. The goal of this work is to improve the optical performance while minimizing the power consumption and operational voltage. Operational characteristics of new D-MEMS have achieved a reduction of the optical switching voltage to 2V at a 6.5V bias. Structural modifications through variation in ruling/top-electrode width and spacing have been studied. An alternative structural material, polyimide, is being optimized for further decreasing the operating voltage of the D-MEMS devices.

MEMS gratings and their applications

“…[143][144][145] In addition, GLV devices can be employed as high-speed optical switches for optical communication applications owing to its modulation properties. [146][147][148] Besides the described sensor applications, [149] MEMS tunable gratings have also been applied to construct microspectrometers, since they can select specific wavelengths sequentially onto the detector by varying the diffraction properties. For microspectrometers based on pitch-tunable gratings, fine scan can be achieved across the target spectrum, but their performance is limited by the changing diffraction efficiency and the tuning range provided by the MEMS actuators.…”