A versatile multi-user polyimide surface micromachinning process for MEMS applications

Arevalo, Arpys; Byas, Ernesto; Castells-Rufas, David; Castro, David; Ilyas, Saad; Foulds, Ian G.

doi:10.1109/nems.2015.7147492

Cited by 32 publications

(18 citation statements)

References 13 publications

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“…Figure 1b shows a schematic of the microbeam design and dimensions; which are length (l) 500 µm, width (w) 20 µm, and gap (g) 3.3 µm. These dimensions are selected to minimize the squeeze film damping in accordance with the fabrication process rules [47]. Figure 1c shows an SEM image of the clamped-clamped resonator.…”

Section: Fabricationmentioning

confidence: 99%

Multimode excitation of a metal organics frameworks coated microbeam for smart gas sensing and actuation

Jaber

Ilyas

Shekhah

et al. 2018

Sensors and Actuators A: Physical

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Highlights The purpose of this study to demonstrate a smart sensor that is capable of performing simultaneous sensing and actuation using a single device which reduce the device size, power requirement, and cost. The concept is based on tracking the frequency shift due to external physical stimuli in the first and third modes of vibration of an electrostatically actuated clamped-clamped microbeam. The microbeam is uniformly functionalized with metal organic frameworks (MOFs) to enhance the sensitivity and selectivity of the proposed sensor. Optimizing the resonator design to excite higher order modes will open the door for simultaneously measuring multiple physical stimuli using a single resonator, which leads to smarter generation of sensors. ABSTRACTSmart sensing systems suffer complexity requiring interface circuits, microcontrollers, switches, and actuators to detect and sense, process the signal and take a decision, and trigger an action upon demand. This increases the device footprint and boosts significantly the power required to actuate the system. Here, we present a hybrid sensor and switch device, which is capable of accurately measuring gas concentration and perform switching when the concentration exceeds specific (safe)

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Section: Fabricationmentioning

confidence: 99%

Multimode excitation of a metal organics frameworks coated microbeam for smart gas sensing and actuation

Jaber

Ilyas

Shekhah

et al. 2018

Sensors and Actuators A: Physical

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“…The device is fabricated using a six layer polyimide multi-user fabrication process with polyimide as a structural layer [34]. Using polyimide as a structural layer allows for the pattering of the metal layer to form independent gate electrodes.…”

Section: Fabricationmentioning

confidence: 99%

Torsion based universal MEMS logic device

Ilyas

Arevalo

Bayes

et al. 2015

Sensors and Actuators A: Physical

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“…Then, the polyimide layer was processed after the pyrolisys steps, due to the polyimide's decomposition temperature of 450 • [14]- [25]. This material was processed following the procedure described in [26], [27]. Other materials such as SU-8 could be potentially used to have desired results [28], [29].…”

Section: Description Of the Fabrication Processmentioning

confidence: 99%

Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

Arevalo

Castells-Rufas

Castro

et al. 2015

10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1 mm diameter and 4 µm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane.978-1-4673-6695-3/15/$31.00 ©2015 IEEE

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A versatile multi-user polyimide surface micromachinning process for MEMS applications

Cited by 32 publications

References 13 publications

Multimode excitation of a metal organics frameworks coated microbeam for smart gas sensing and actuation

Multimode excitation of a metal organics frameworks coated microbeam for smart gas sensing and actuation

Torsion based universal MEMS logic device

Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

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