2015
DOI: 10.1016/j.sna.2015.10.039
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Torsion based universal MEMS logic device

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Cited by 25 publications
(27 citation statements)
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References 32 publications
(28 reference statements)
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“…The proposed device in its current form occupies an area of ~3.2x10 5 µm 2 including electrodes and anchors. This provides the device with an integration density of ~10 3 . The theoretical open loop operating speed of the device is found to be, / Q f~200Hz, where f is the resonance frequency and Q is the quality factor [10].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The proposed device in its current form occupies an area of ~3.2x10 5 µm 2 including electrodes and anchors. This provides the device with an integration density of ~10 3 . The theoretical open loop operating speed of the device is found to be, / Q f~200Hz, where f is the resonance frequency and Q is the quality factor [10].…”
Section: Resultsmentioning
confidence: 99%
“…Switch based MEMS/NEMS logic devices have been demonstrated capable of performing multiple logic operations using a single structure [2,3]. These devices however have limitations in practical application due to wearing of the contacting surfaces over time, in addition to other stiction and friction issues [4].…”
Section: Introductionmentioning
confidence: 99%
“…This mode has the advantages of zero leakage current and the ability to easily cascade multiple elements to execute complex logic operations. However, their high contact resistance, low speed, and stiction issues limit their potential in demonstrating practical applications [7,8]. Therefore, a new research direction has emerged focusing on the noncontact mode by employing the dynamic vibration of MEMS and NEMS resonators.…”
Section: Introductionmentioning
confidence: 99%
“…Nonlinear dynamics of electrostatically actuated micro/nano electromechanical (MEMS/NEMS) beam resonators are being studied extensively and used in various applications [1]. These applications span various areas, such as mass sensing [2,3], mechanical computing [4][5][6][7][8], and radio frequency (RF) communication [9,10].…”
Section: Introductionmentioning
confidence: 99%