2008
DOI: 10.1016/j.jcrysgro.2008.07.032
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Optically in-situ monitored growth of carbon doped InAlAs by LP-MOVPE using CBr4

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Cited by 6 publications
(2 citation statements)
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“…However, it affects the Al x In x −1 As layer composition as the bromide species react both with vapor and solid phase during growth, as reported in Ref. . Depending on chosen CBr 4 flow and growth conditions, the TMAl/TMIn ratio should be readjusted consequently to insure lattice‐matched AlInAs:C.…”
Section: Methodsmentioning
confidence: 95%
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“…However, it affects the Al x In x −1 As layer composition as the bromide species react both with vapor and solid phase during growth, as reported in Ref. . Depending on chosen CBr 4 flow and growth conditions, the TMAl/TMIn ratio should be readjusted consequently to insure lattice‐matched AlInAs:C.…”
Section: Methodsmentioning
confidence: 95%
“…The two layers constituting the TJ were firstly separately grown in thicker structures, then characterized by high‐resolution X‐ray diffraction (XRD) and Electrochemical Capacitance‐Voltage profile (ECV). As a p dopant, C was chosen instead of Zn because of its very low diffusion coefficient and extremely high achievable doping levels …”
Section: Methodsmentioning
confidence: 99%