1989
DOI: 10.1117/12.949151
|View full text |Cite
|
Sign up to set email alerts
|

Optical Methods Of Measuring Rough Surfaces

Abstract: The statistical para~eters of surfaces to be measured for industrial applications vary over several orders of maqnitude. Surfaces with large slopes or edges are particularly difficult to be recorded. Some measuring methods developed in our laborato ry are compared and the range of applications are discussed .For polished and tine qr ound glass and metal surfaces a heterodyne profilometer with a vertical resolution of O.S nm, lateral resolution of 0.6 ~m. and large scanning length is discussed. The interferomet… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
3
0
1

Year Published

1995
1995
2023
2023

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 8 publications
(4 citation statements)
references
References 2 publications
0
3
0
1
Order By: Relevance
“…Constructions based on optical phenomena are being created, regardless of the contact devices. As a result, the optical approaches have been thoroughly detailed in the scientific literature [23][24][25][26][27].…”
Section: Direct Measurement Methodsmentioning
confidence: 99%
“…Constructions based on optical phenomena are being created, regardless of the contact devices. As a result, the optical approaches have been thoroughly detailed in the scientific literature [23][24][25][26][27].…”
Section: Direct Measurement Methodsmentioning
confidence: 99%
“…First commercial optical profilometers began to emerge in the early 1980s. These instruments were produced by a few companies -Chapman Instruments [13], Wyko [14] and Zygo [15]. The general principle of operation of a such classic instrument was to illuminate the a selected area of examined surface with a focused beam of light, whereby the location of focus of the light wave in relation to this surface was analyzed.…”
Section: Optical Profilometry -Instruments and Sensorsmentioning
confidence: 99%
“…Irrespective of the contact devices, constructions based on optical phenomena are being developed. Therefore, the optical methods have been described in depth in the scientific literature [44][45][46][47][48]. New solutions have introduced CCD (Charge-Coupled Device) lines and arrays to detect the light signal as used in the light scattering methods.…”
Section: Roughness Measurement Technique a Profilometer Technique Wamentioning
confidence: 99%