The statistical para~eters of surfaces to be measured for industrial applications vary over several orders of maqnitude. Surfaces with large slopes or edges are particularly difficult to be recorded. Some measuring methods developed in our laborato ry are compared and the range of applications are discussed .For polished and tine qr ound glass and metal surfaces a heterodyne profilometer with a vertical resolution of O.S nm, lateral resolution of 0.6 ~m. and large scanning length is discussed. The interferometer can be c hanged from sinqle-to double-pass operation by rotation of a quarter-wave-plate.For rouqher surfaces a profilometer of the photometric-balance type with resolution Rq ; 4 na and dynamiC range of 20 ~m and an interference microscope with automated fringe evaluation is described . An integral white light roughness sensor covers the roughness range 0.04~. to 10~. and measures independently mean roughness and autocorrelation width .
Schlagwörter: Rauheit, Streuung, Oberflächen-Meßtechnik, Profilometrie, optische Sensoren Es werden moderne optische Verfahren zur berührungslosen Oberflächentopographie und Rauheitsmessung beschrieben und ihre Leistungsfähigkeit anhand neuerer Messungen und Analysen diskutiert. Dabei werden zwei Verfahren der Mikroprofilometrie, eine schnelle 3-D-Darstellung der Oberflächentopographie mit automatischer Interferenzstreifenauswertung, kohärente Streuverfahren und ein integrales Weißlicht-Kohärenzverfahren ausführlich behandelt. Außerdem werden eine neue Doppelpaß-Strahlenführung und Ausdrücke für die Erfassung der Lateralauflösung in Abhängigkeit von der numerischen Apertur und dem Ausleuchtungsverhältnis angegeben.Recent optical techniques for microtopography and roughness measurements are examined, particularly two methods for high-resolution microprofilometry, a fast 3-dimensional representation of the topography by automated interferogram analysis, coherent scattering methods and a white light coherence method for integral roughness measurement. In addition a double-pass scheme for profilometry and some expressions for lateral resolution in terms of numerical aperture and aperture ratio are introduced.
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