2015 Symposium on VLSI Technology (VLSI Technology) 2015
DOI: 10.1109/vlsit.2015.7223708
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Operation fundamentals in 12Mb Phase Change Memory based on innovative Ge-rich GST materials featuring high reliability performance

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Cited by 27 publications
(28 citation statements)
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“…In the work of Cheng et al, [24] time-resolved XRD shows the formation of these two phases, Ge and cubic GST-225, from about 266 C for a ramp-rate of 1 C s À1 . For others, the two cubic phases are evidenced following annealing at 350 C, for a higher Ge excess of 45%, [27] or even at 375 C (high Ge content but unknown exact composition). [14] In general, it is noted that the "crystallization" temperature increases as the Ge content in the as-deposited amorphous films increases.…”
Section: Thermal Crystalization Of Ge-rich Alloys: Ge Firstmentioning
confidence: 99%
See 1 more Smart Citation
“…In the work of Cheng et al, [24] time-resolved XRD shows the formation of these two phases, Ge and cubic GST-225, from about 266 C for a ramp-rate of 1 C s À1 . For others, the two cubic phases are evidenced following annealing at 350 C, for a higher Ge excess of 45%, [27] or even at 375 C (high Ge content but unknown exact composition). [14] In general, it is noted that the "crystallization" temperature increases as the Ge content in the as-deposited amorphous films increases.…”
Section: Thermal Crystalization Of Ge-rich Alloys: Ge Firstmentioning
confidence: 99%
“…[60,61] For GGST, the chemical homogeneity can be found only in the as-deposited layer as it is lost when the dome recrystallizes as a two-phase material. [27] Figure 8. Depth-distributions of the different chemical elements, obtained by integration of STEM-EDX images along the depth.…”
Section: Electrical Characteristics: Percolationmentioning
confidence: 99%
“…Crystallization time as a function of temperature. < ABC is the sum of < I* and < G* , so that the process is quick at high temperature and slow at low temperature the low current regime and the Rampdown SET is high current pulses with increasing fall times [30], [31].…”
Section: Electrical Characterization Methodsmentioning
confidence: 99%
“…On the contrary Ge-rich GST compounds, as explained in Ref. [13]- [14], exhibit much higher crystallization temperature and slower crystallization speed at material level; implying at device level better data retention (Figure 8(a)) and lower SET speed (Figure 8(b)), respectively. Such class of material is indeed most suited for embedded applications (ie automotive, smartcard) [11].…”
Section: Pcmmentioning
confidence: 96%