On-Wafer Vector Network Analyzer Measurements in the 220-325 GHz Frequency Band

Abstract

We report on a full two-port on-wafer vector network analyzer test set for the 220-325 GHz (WR3) frequency band. The test set utilizes Oleson Microwave Labs frequency extenders with the Agilent 8510C network analyzer. Two port on-wafer measurements are made with GGB Industries coplanar waveguide (CPW) probes. With this test set we have measured the WR3 band S-parameters of amplifiers on-wafer, and the characteristics of the CPW wafer probes. Results for a three stage InP HEMT amplifier show 10 dB gain at 235 GHz [11, and that of a single stage amplifier, 2.9 dB gain at 231 GHz. The approximate upper limit of loss per CPW probe range from 3.0 to 4.8 dB across the WR3 frequency band.

An Overview of Solid-State Integrated Circuit Amplifiers in the Submillimeter-Wave and THz Regime

“…These have been characterized and described in [14] and [15]. Wafer probes have been developed by GGB Industries [16], and on-wafer -parameter calibration and characterization has been carried out in both the WR3 (220-325 GHz) and WR 2.2 (325-500 GHz) waveguide bands [17], [18]. In addition to -parameters, on-wafer noise measurements have been enabled by the wafer probes, and analysis and measured data on a 270-GHz amplifier are presented in [19].…”

Demonstration of a 270-GHz MMIC Amplifier Using 35-nm InP HEMT Technology

“…-parameters of the amplifier have been measured on-wafer at the Jet Propulsion Laboratory, using the test setup reported in [10]. The setup consists of an Oleson Microwave Laboratory frequency extender with an Agilent 8510c network analyzer, and GGB industries WR3 60-m pitch CPW probes.…”

“…The setup consists of an Oleson Microwave Laboratory frequency extender with an Agilent 8510c network analyzer, and GGB industries WR3 60-m pitch CPW probes. In [10], the setup was tested only to 325 GHz. However, amplifier presented here was tested to the edge of the frequency response of the setup.…”

Terahertz micromachined on-wafer probes: Repeatability and robustness

“…Also, calibrated on-wafer measurements can set the measurement reference plane right next to the tested device to achieve more accurate device measurements that can be used to create measurement-based circuit models to facilitate designs. However, on-wafer probes are unavailable above 325 GHz [4].…”