Demonstration of a 270-GHz MMIC Amplifier Using 35-nm InP HEMT Technology

Abstract

In this letter, the first 270-GHz millimeter-wave integrated circuit (MMIC) amplifier is demonstrated. Peak measured gain of 11.6-dB is measured for the three stage amplifier realized in coplanar waveguide. Further, positive S21 gain is measured to 340 GHz making this the highest frequency MMIC amplifier reported to date. The high frequency circuit performance is enabled through a 35-nm InP high electron mobility transistor capable of extremely high frequency operation. Index Terms-Coplanarwaveguide (CPW), high electron mobility transistor (HEMT), low noise amplifier (LNA), millimeterwave (MM-wave), MM-wave integrated circuit (MMIC), sub-MMwave.

Broadband Characterization of a 100 to 180 GHz Amplifier

“…The output conductance is also well controlled by a carefully optimized gate recess etch and epitaxial structure design. The gate was formed with over 85% yield and excellent uniformity [10].…”

“…The measured 1 to 110 GHz S-parameters were used to calculate these H21 and MAG values for a 30 pm InP HEMT device at a drain bias of 1 V and Ids of 300 mA/mm[10].…”

A Metamorphic 220-320 GHz HEMT Amplifier MMIC

“…Advances in the epitaxial growth and the process technology of InP-based high electron mobility transistors (HEMTs) have enabled the fabrication of monolithic integrated circuits in the high millimeter-wave and submillimeter-wave frequency regime [1,2]. The atmospheric windows around 94, 140, 220, and 340 GHz are of great interest for passive and active imaging applications such as direct-detection radiometers for remote atmospheric sensing or planetary exploration, aircraft landing and taxiing, helicopter wire detection, through-wall imaging, detection of concealed weapons or plastic explosives, or the next generation synthetic aperture radar (SAR) for high-resolution reconnaissance and surveillance.…”

Compact accurate scalable model for millimeter wave InP CPW with under-bridge

“…Instead of air-bridge, under-bridge is used due to its better mechanical strength as well as potentially higher accuracy (rather than the square structure simplified in many model analysis, airbridge is actually arc shaped [5]), and its compact accurate scalable model is established and verified by measurements and EM simulations in Chapter 2. It is straight-forward analytical formula based, and with modeling idea different from the 'hybrid technique' in [1], the structure of bridge under CPW is considered as an integrated entity.…”