Offset stable piezoresistive high-temperature pressure sensors based on  silicon

Täschner, Robert; Hiller, E.; Blech, M.

doi:10.5194/jsss-5-197-2016

Cited by 4 publications

(1 citation statement)

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“…The glass frit bonded sensor assembly undergoes high strain with temperature variations due to the large CTE mismatch between the silicon and the glass frit and steel diaphragm [25,26]. They also suffer from the relaxation process in the glass leading to shift and hysteresis of zero offset at elevated temperature [38]. The stability and hysteresis of the zero offset as well as the sensitivity were tested after different temperature cycles.…”

Section: Discussionmentioning

confidence: 99%

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Han,

Min,

Lee

et al. 2023

Sensors

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Half-bridge silicon strain gauges are widely used in the fabrication of diaphragm-type high-pressure sensors, but in some applications, they suffer from low output sensitivity because of mounting position constraints. Through a special design and fabrication approach, a new half-bridge silicon strain gauge comprising one arc gauge responding to tangential strain and another linear gauge measuring radial strain was developed using Silicon-on-Glass (SiOG) substrate technology. The tangential gauge consists of grid patterns, such as the reciprocating arc of silicon piezoresistors on a thin glass substrate. When two half-bridges are connected to form a full bridge with arc-shaped gauges that respond to tangential strain, they have the advantage of providing much higher output sensitivity than a conventional half-bridge. Pressure sensors tested under pressure ranging from 0 to 50 bar at five different temperatures indicate a linear output with a typical sensitivity of approximately 16 mV/V/bar, a maximum zero shift of 0.05% FS, and a span shift of 0.03% FS. The higher output level of pressure sensing gauges will provide greater signal strength, thus maintaining a better signal-to-noise ratio than conventional pressure sensors. The offset and span shift curves are quite linear across the operating temperature range, giving the end user the advantage of using very simple algorithms for temperature compensation of offset and span shift.

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Section: Discussionmentioning

confidence: 99%