High withstand voltage pressure sensors for climate control systems

Han, Jiwon; Kim, Ki Beom; Kim, Joon Hyub; Min, Nam Ki

doi:10.1016/j.sna.2020.112410

Cited by 4 publications

(6 citation statements)

References 11 publications

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“…The slight difference in characteristics between the three arc-shaped gauge-based sensors is due to the differences in their dopant concentration, glass frit thickness, post-bonding position and steel diaphragm thickness. The measured sensitivity of the developed pressure sensors has been found to be approximately 1.25 times higher than that of a conventional gauge pressure sensor [4]. This is because arc-shaped gauges respond to much greater tangential strain instead of a lower radial strain, while conventional gauges only measure radial strain.…”

Section: Silicon Gauge Gauge Factor (Gf) Linearitymentioning

confidence: 94%

“…High-pressure measurement requires a special sensor design to ensure high performance and safety over a wide temperature range. Commonly used high-pressure sensor technology includes an oil-filled pressure sensor based on the MEMS [1][2][3], a micro fused silicon strain gauge (MSG) sensor [4][5][6][7][8], a thin-film strain gauge pressure sensor [9][10][11] and a thick ceramic film pressure sensor [12][13][14]. The first three key technologies use a steel diaphragm: these stainless-steel transducers can also operate with a full-scale accuracy of 0.5% over a wide temperature range from −40 • C to 150 • C.…”

Section: Introductionmentioning

confidence: 99%

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Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Han,

Min,

Lee

et al. 2023

Sensors

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Half-bridge silicon strain gauges are widely used in the fabrication of diaphragm-type high-pressure sensors, but in some applications, they suffer from low output sensitivity because of mounting position constraints. Through a special design and fabrication approach, a new half-bridge silicon strain gauge comprising one arc gauge responding to tangential strain and another linear gauge measuring radial strain was developed using Silicon-on-Glass (SiOG) substrate technology. The tangential gauge consists of grid patterns, such as the reciprocating arc of silicon piezoresistors on a thin glass substrate. When two half-bridges are connected to form a full bridge with arc-shaped gauges that respond to tangential strain, they have the advantage of providing much higher output sensitivity than a conventional half-bridge. Pressure sensors tested under pressure ranging from 0 to 50 bar at five different temperatures indicate a linear output with a typical sensitivity of approximately 16 mV/V/bar, a maximum zero shift of 0.05% FS, and a span shift of 0.03% FS. The higher output level of pressure sensing gauges will provide greater signal strength, thus maintaining a better signal-to-noise ratio than conventional pressure sensors. The offset and span shift curves are quite linear across the operating temperature range, giving the end user the advantage of using very simple algorithms for temperature compensation of offset and span shift.

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Section: Silicon Gauge Gauge Factor (Gf) Linearitymentioning

confidence: 94%

Section: Introductionmentioning

confidence: 99%

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Han,

Min,

Lee

et al. 2023

Sensors

Self Cite

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“…In Equation (2), the factor of 5 was selected because five identical arc piezoresistors were connected by a turn-around aluminum loop in order to achieve tangential current flow through strain gauge and to minimize the transverse sensitivity of a measuring piezoresistor [ 23 ]. The gauge chips measuring the tangential strain were designed in dual-strain gauge patterns, as shown in Figure 4 , which has both gauges on a common glass backing like conventional silicon half-bridge chips [ 20 , 21 ]. Compared to the single strain gauges shown in Figure 1 c, this design offers benefits such as easier and faster installation and alignment.…”

Section: Sensor Design and Simulationmentioning

confidence: 99%

“…The development of semiconductor (piezoresistive) strain gauges provides a solution to the low-output problem of metal gauges, as they have a sensitivity up to 100 times greater than that of metallic gauges due to the piezoresistive effect [ 12 , 13 ]. Commercially available silicon strain gauges for diaphragm pressure sensors are designed with a single stain gauge [ 14 , 15 ] or half-bridge configurations [ 16 , 17 , 18 , 19 , 20 , 21 ], as shown in Figure 1 b,c. The half-bridge chip consists of two strain gauges and is very popular for commercial usage because of a reduced number of bonds to the steel diaphragm and faster installation.…”

Section: Introductionmentioning

confidence: 99%

Reciprocating Arc Silicon Strain Gauges

Han

Min²,

Kim

et al. 2023

Sensors

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Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, reducing the long-term stability, reliability, and yield of the diaphragm pressure sensor. In this study, a new design of general-purpose silicon strain gauges was developed to improve the sensor output voltage while reducing the number of bonds. The new gauges consist grid patterns with a reciprocating arc of silicon piezoresistors on a thin glass backing. The gauges make handling easier in the bonding process due to the use of thin glass for the gauge backing. The pressure sensors were tested under pressure ranging from 0 to 50 bar at five different temperatures, with a linear output with a typical sensitivity of approximately 16 mV/V/bar and an offset shift of –6 mV to 2 mV. The new approach also opens the possibility to extend arc strain gauges to half-bridge and full-bridge configurations to further reduce the number of glass frit and Al wire bonds in the diaphragm pressure sensor.

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“…A pressure sensor is a device that can transduce mechanical pressure to an electrical or optical signal. It has gained considerable attention from various traditional industries such as automotive [ 1 , 2 ], aviation [ 3 , 4 , 5 ], and manufacturing industries [ 6 , 7 , 8 , 9 ] since it can help in controlling the system stability and process flow. Recently, owing to the advances in materials science, mechanical engineering, and fabrication technologies, the pressure sensor can be implemented with various materials and dimension, enabling its application in a wide range of emerging academia disciplines and industrial fields, such as robotics [ 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ], artificial intelligence [ 18 , 19 , 20 , 21 ], and smart factory [ 22 , 23 ].…”

Section: Introductionmentioning

confidence: 99%

Micro-/Nano-Structured Biodegradable Pressure Sensors for Biomedical Applications

Shin

Lee

et al. 2022

Biosensors

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The interest in biodegradable pressure sensors in the biomedical field is growing because of their temporary existence in wearable and implantable applications without any biocompatibility issues. In contrast to the limited sensing performance and biocompatibility of initially developed biodegradable pressure sensors, device performances and functionalities have drastically improved owing to the recent developments in micro-/nano-technologies including device structures and materials. Thus, there is greater possibility of their use in diagnosis and healthcare applications. This review article summarizes the recent advances in micro-/nano-structured biodegradable pressure sensor devices. In particular, we focus on the considerable improvement in performance and functionality at the device-level that has been achieved by adapting the geometrical design parameters in the micro- and nano-meter range. First, the material choices and sensing mechanisms available for fabricating micro-/nano-structured biodegradable pressure sensor devices are discussed. Then, this is followed by a historical development in the biodegradable pressure sensors. In particular, we highlight not only the fabrication methods and performances of the sensor device, but also their biocompatibility. Finally, we intoduce the recent examples of the micro/nano-structured biodegradable pressure sensor for biomedical applications.

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High withstand voltage pressure sensors for climate control systems

Cited by 4 publications

References 11 publications

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Reciprocating Arc Silicon Strain Gauges

Micro-/Nano-Structured Biodegradable Pressure Sensors for Biomedical Applications

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