“…PL result reflects the crystallinity related to photo-generated carrier's activity, so it is very important for photovoltaic application. The appearance, sharpening and position shift of TO-BE, TA-BE, D1 and tail-to-tail peaks can be used to judge the crystalline quality of poly-Si thin films, because they will be shifted to lower energy and broadened by residual strain which results from dislocations and point defects [4,[7][8][9][10][11]. In the case of poly-Si thin films on silicon substrates, TO-BE peak clearly increased with grain size enlargement as shown in Fig.…”