Kalibriernormal für Geräte der registrierenden Härteprüfung (Standard for Calibration of Instruments of Hardness Testing)

Frühauf, Joachim; Gärtner, Eva; Herrmann, Konrad; Menelao, Febo

doi:10.1524/teme.2007.74.7-8.385

Cited by 7 publications

(6 citation statements)

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“…NIST and NPL have developed devices with the electrostatic force acting on an electrode suspended from a vertically oriented uniaxial spring suspension [57][58][59]. PTB's system is based on a horizontally oriented disc pendulum and a variable electrostatic stiffness reduction system [60].…”

Section: Mechanical Nanometrologymentioning

confidence: 99%

The European nanometrology landscape

Leach¹,

Boyd²,

Burke³

et al. 2011

Nanotechnology

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This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national and international programmes, regulation and skills development will be discussed in a future paper.

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Section: Mechanical Nanometrologymentioning

confidence: 99%

The European nanometrology landscape

Leach¹,

Boyd²,

Burke³

et al. 2011

Nanotechnology

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“…The probing force is an important parameter of the micro/nano CMM probe, as has already been pointed out. We calibrate the probe's spring constant by applying a micro force calibration standard [12], which is a micro fabricated silicon cantilever as shown in figure 6. The spring constant of the cantilever has been calibrated by means of a compensation balance before usage [12].…”

Section: Force Calibrationmentioning

confidence: 99%

“…We calibrate the probe's spring constant by applying a micro force calibration standard [12], which is a micro fabricated silicon cantilever as shown in figure 6. The spring constant of the cantilever has been calibrated by means of a compensation balance before usage [12]. It should be mentioned that the force must be applied at the marked position of the cantilever, shown as the stop mark in the figure, when the standard is calibrated and when it is applied to calibrate the CMM probe.…”

Section: Force Calibrationmentioning

confidence: 99%

A high precision micro/nano CMM using piezoresistive tactile probes

Dai

Bütefisch

Pohlenz

et al. 2009

Meas. Sci. Technol.

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To satisfy various demands of micro-and nanoscale-dimensional metrology, a coordinate measuring system based on a nano positioning and measuring machine (NMM) has been built. The measuring system is able to perform measurements by using sensors such as scanning force microscopes, stylus profilometers, optical fixed focus sensors and assembled cantilever probes. In recent years, two kinds of tactile micro/nano CMM probes have been developed and coupled to the system. In such a way, the function of the device has been expanded from a metrological SFM to a micro/nano CMM. In this paper, the development of the micro/nano CMM is reported. The design ideas concerning the key components of the CMM, such as positioning stage, probe and software, are introduced. The characterization of the probe is described in more detail. Measurements on a typical test artefact have been demonstrated as an example.

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“…für Tastschnittgeräte mit Biegebalken-Normalen aus Silizium möglich [7]. Für die Kalibrierung von Indentern für die instrumentierte Eindringprüfung sind kalibrierte mikromechanische Silizium-Federn verfügbar, die allerdings neben einer hohen Linearität einen Kalibrierpunkt in der Kraft-Auslenkungs-Charakteristik aufweisen [8][9][10]. Man erreicht dies durch eine Verbindung zweier Federkörper in einem Chip-Stapel [8,9] oder auch monolithisch integriert an der Oberfläche eines einzigen Chips [10].…”

Section: Introductionunclassified