A high precision micro/nano CMM using piezoresistive tactile probes

Dai, Gaoliang; Bütefisch, Sebastian; Pohlenz, Frank; Danzebrink, Hans‐Ulrich

doi:10.1088/0957-0233/20/8/084001

Cited by 65 publications

(32 citation statements)

References 15 publications

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“…A photo of such a sensor chip is shown in Figure 2c. The probe was originally designed and fabricated at the Institute for Microtechnology of the Technical University Braunschweig (Braunschweig, Germany) [16], and PTB has applied this technique to micro-CMM applications and has fully investigated its performance in order to achieve improvements [10,36].…”

Section: Boss-membrane Piezoresistive Microprobementioning

confidence: 99%

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Overview of 3D Micro- and Nanocoordinate Metrology at PTB

et al. 2016

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Improved metrological capabilities for three-dimensional (3D) measurements of various complex micro-and nanoparts are increasingly in demand. This paper gives an overview of the research activities carried out by the Physikalisch-Technische Bundesanstalt (PTB), the national metrology institute of Germany, to meet this demand. Examples of recent research advances in the development of instrumentation and calibration standards are presented. An ultra-precision nanopositioning and nanomeasuring machine (NMM) has been upgraded with regard to its mirror corner, interferometers and angle sensors, as well as its weight compensation, its electronic controller, its vibration damping stage and its instrument chamber. Its positioning noise has been greatly reduced, e.g., from 1σ = 0.52 nm to 1σ = 0.13 nm for the z-axis. The well-known tactile-optical fibre probe has been further improved with regard to its 3D measurement capability, isotropic probing stiffness and dual-sphere probing styli. A 3D atomic force microscope (AFM) and assembled cantilever probes (ACPs) have been developed which allow full 3D measurements of smaller features with sizes from a few micrometres down to tens of nanometres. In addition, several measurement standards for force, geometry, contour and microgear measurements have been introduced. A type of geometry calibration artefact, referred to as the "3D Aztec artefact", has been developed which applies wet-etched micro-pyramidal marks for defining reference coordinates in 3D space. Compared to conventional calibration artefacts, it has advantages such as a good surface quality, a well-defined geometry and cost-effective manufacturing. A task-specific micro-contour calibration standard has been further developed for ensuring the traceability of, e.g., high-precision optical measurements at microgeometries. A workpiece-like microgear standard embodying different gear geometries (modules ranging from 0.1 mm to 1 mm) has also been developed at the Physikalisch-Technische Bundesanstalt.

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Section: Boss-membrane Piezoresistive Microprobementioning

confidence: 99%

“…[42]. An application example was introduced in [36]; however, it is only suitable for calibrating the z probing axis due to its size limit.…”

Section: Microforce Calibration Standardmentioning

confidence: 99%

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

et al. 2016

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“…Tactile sensor has been investigated by Cao et al [59] to achieve measurement uncertainly less than 100 nm in measuring range of 25 mm × 25 mm × 13 mm. Dai et al [60] has also developed CMM to meet the needs of micro-and nano scale dimensional metrology. Design information regarding key components of CMM such as positioning stage, probe and software, etc., can be found in this paper.…”

Section: Evolution Of Micro/nano Cmmsmentioning

confidence: 99%

New developments in coordinate measuring machines for manufacturing industries

Mian

Al-Ahmari

2014

Int. J. Metrol. Qual. Eng.

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Abstract. There have been substantial improvements in measurement systems in order to meet fluctuating market demands. This rapid change and development in measurement technology has primarily been governed by demands of accuracy and precision from aerospace, automotive and other manufacturing industries. Coordinate measuring machines (CMMs) available with different technologies and configurations has efficiently been fulfilling customer demands for more than a decade. Though, current CMMs can meet needs of rapid and increased demands of customers to a greater extent but still there is lot of scope for improvement and development in CMMs. The globalization of manufacturing has resulted in development of variety of complex products and miniaturization of mechanical components. The technology of micro/nanoscale 3D measurement is still a bottleneck for industries. Therefore, precise and accurate system which is flexible enough to deal with complexities of parts and micro & nano range products has to be investigated. In this paper, comprehensive review concerning CMMs with capabilities to measure micro/nano features has been presented. This work has also discussed different methods to estimate measurement uncertainty, as well as performance evaluation of CMMs. Moreover, novel concepts such as intelligent CMM, multi-sensor CMM, virtual CMM have been presented.

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“…Accordingly, many micro-/nano-coordinate measuring machines (micro-/nano-CMMs) have been proposed to satisfy the urgent demand for the dimensional measurement of micro parts [1][2][3][4]. Many touch probing systems that can be equipped onto micro-/nano-CMMs have also been developed, such as (a) the capacitive probe that uses at least three high-precision capacitive sensors to detect the arm's displacement of the floating plate of the probe [5,6], (b) the strain gauge probe that adheres strain gauges on the membrane or cantilevers symmetrically to detect the ball tip's motion using the piezo-resistive effect [7][8][9][10], (c) the inductive probe that uses three high-precision inductive sensors and a complicated flexure hinges to construct the probe head [11], (d) the fiber probe that uses the imaging system to detect the ball tip's motion [12][13][14] or uses long Bragg gratings to detect the axial different optical principles to detect the probe motion, such as position detector, focus sensor, interferometer, auto-collimator, etc. [18][19][20][21][22][23][24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

Fan

et al. 2016

Applied Sciences

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Abstract:To measure various components with nano-scale precision, a new high-precision touch-trigger probe using a single low-cost sensor for a micro-coordinate measuring machine (CMM) is presented in this paper. The sensor is composed of a laser diode, a plane mirror, a focusing lens, and a quadrant photo detector (QPD). The laser beam from the laser diode with an incident angle is reflected by the plane mirror and then projected onto the quadrant photo detector (QPD) via the focusing lens. The plane mirror is adhered to the upper surface of the floating plate supported by an elastic mechanism, which can transfer the displacement of the stylus's ball tip in 3D to the plane mirror's vertical and tilt movement. Both motions of the plane mirror can be detected by respective QPDs. The probe mechanism was analyzed, and its structural parameters that conform to the principle of uniform sensitivity and uniform stiffness were obtained. The simulation result showed that the stiffness was equal in 3D and less than 1 mN/µm. Some experiments were performed to investigate the probe's characteristics. It was found that the probe could detect the trigger point with uniform sensitivity, a resolution of less than 5 nm, and a repeatability of less than 4 nm. It can be used as a touch-trigger probe on a micro/nano-CMM.

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A high precision micro/nano CMM using piezoresistive tactile probes

Cited by 65 publications

References 15 publications

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

New developments in coordinate measuring machines for manufacturing industries

Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

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