Accurate circuit modeling and simulation ofSilicon-on-Insulator (SOI) enhancement and depletion Junction Field-Effect transistors (JFETs) is presented. The nonuniformity in FET device parameters along the channel depth (due to fabrication processes), is taken into account. This is typical in SOI and other thin-film structures. Since SOI fabrication processes parameters are represented, in our model, by a closed form mobility variation, improved model accuracy is guaranteed. Simulation results are found to be within less than 3% of actual measurements. Small-signal circuit-model parameters are determined for SOI FJETs and then evaluated for further logic applications. Inverters with a channel Enhancenient-JFET (E-JFET) drivers and nchannel depletion-JFET loads (E/D inverters) are also considered with different supply voltage values, device parameters and digital applications.