Innovative high-performance nanowire-grid polarizers and integrated isolators

Free-space nano-optical devices and integration: Design, fabrication, and manufacturing

“…In the past three years, we have processed more than 1,000 4-inch-in-diameter wafers for nano-optic polarizers and waveplates by using the nanomanufacturing technology described in this paper, which is based on nanoreplication and nanolithography [28,30]. Statistically, we have achieved wafer throughput of 15 wafers (4 inches in diameter) per hour by means of nanoreplication.…”

Dual-Layer Frequency-Selective Grid Polarizers on Thin-Film Substrates for THz Applications

“…Conventional grid polarizers dominated the area for many decades [1], [2]. For today, however, this design has nearly exhausted its potential.…”

“…For today, however, this design has nearly exhausted its potential. Now, more advanced structures are needed, e.g., those based on chemically etched vertical or horizontal microstrip grids produced by special techniques (photolithography etc [2]), designed for exceptional performance in specific frequency bands, manufactured with extremely fine grids for THz and infrared systems, and optimized for particular applications [3].…”

The effects of thin-film thickness on the formaton of metallic patterns by direct nanoimprint

“…In addition, NIL has also been developed to fabricate metallic patterns, such as nanowires [4][5][6]. However, this involves more procedures than the fabrication of polymeric nano-structures.…”