The effects of thin-film thickness on the formaton of metallic patterns by direct nanoimprint

Cheng, Ming-Chieh; Sung, Cheng-Kuo; Wang, W.H.

doi:10.1016/j.jmatprotec.2007.03.049

Cited by 9 publications

(6 citation statements)

References 13 publications

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“…In addition, metallic material has better thermal conductivity that makes heat dissipate easily and quickly instead of absorbing inside the structures that will result in deterioration of the materials. Many manufacturing processes, such as photolithography, nanoimprint lithography, have been demonstrated having the capability of generating the metallic gratings [1][2][3][4][5][6][7][8]. Among those manufacturing processes, nanoimprint lithography is the most popular method to fabricate the WGP.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication sub-10nm metallic gratings with carbon nanotube - A study by molecular dynamics simulation method

Cheng

Sung

2011

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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In this research project we present a novel manufacturing process which is able to fabricate sub-10nm metallic gratings. It utilizes CNTs as a wire-cutting tool to remove the tiny metallic materials and fabricates the metallic gratings. The strategy is to embed the CNTs into the metallic material first, and then steer one ends of the CNTs upward with a constant velocity, CNTs will behavior like a knife and cut the material. A full scale three-dimension molecular dynamics simulation is employed to simulate the entire procedure. The formation mechanism and advantage of this innovation method are discussed; in addition, the effects of the steering velocity are exploited as well. The resulting data shows the sub-10nm metallic gratings can be fabricated successfully by exerting a small force on CNTs.

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Section: Introductionmentioning

confidence: 99%

“…However, in addition to the nanoimprint lithography process, extra procedures are necessary which make the methods become complicated. Although Cheng et al [7,8] proposed a simplified method by directly imprinting on the metallic film to manufacture the metallic gratings; nevertheless, the large imprinting force is inevitable.…”

Section: Introductionmentioning

confidence: 99%

Fabrication sub-10nm metallic gratings with carbon nanotube - A study by molecular dynamics simulation method

Cheng

Sung

2011

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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“…Another study reported sub-10 nm grooves embossed into a thick nickel film using a diamond mold template [11]. Silicon can be used as a mold for metal forging [5,6,9,10,19,20], although silicon does not have the compressive strength of SiC or diamond, and so silicon mold templates require lower forging pressures 1 Author to whom any correspondence should be addressed. and more ductile metals.…”

Section: Introductionmentioning

confidence: 99%

Casting metal microstructures from a flexible and reusable mold

Cannon

King²

2009

J. Micromech. Microeng.

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This paper describes casting-based microfabrication of metal microstructures and nanostructures. The metal was cast into flexible silicone molds which were themselves cast from microfabricated silicon templates. Microcasting is demonstrated in two metal alloys of melting temperature 70 °C or 138 °C. Many structures were successfully cast into the metal with excellent replication fidelity, including ridges with periodicity 400 nm and holes or pillars with diameter in the range 10–100 µm and aspect ratio up to 2:1. The flexibility of the silicone mold permits casting of curved surfaces, which we demonstrate by fabricating a cylindrical metal roller of diameter 8 mm covered with microstructures. The metal microstructures can be in turn used as a reusable molding tool.

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“…Previous MD simulation results of NIL [9,10] have provided information on the deformation of a substrate and indentation (or separation) forces usually for the system with a single species of atom. However, MD studies for the deformation of polymer resist have been rarely reported, in spite of their rising importance in many applications including the NIL process.…”

Section: Introductionmentioning

confidence: 99%

Molecular Dynamic Studies on Deformation of Polymer Resist During Thermal Nano Imprint Lithographic Process

Woo

Lee

2009

Tribol Lett

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Molecular dynamic simulation of nano imprint lithography (NIL) in which nanoscale patterned stamp is pressed onto amorphous polyethylene (PE) surface is performed to study the deformation behavior of polymer resist. Force fields including bond, angle, torsion, and Lennard Jones potential are used to describe the intermolecular and intra-molecular forces of PE molecules and stamp. Periodic boundary condition is used in horizontal direction and canonical NVT ensemble is employed to control the system temperature. Using the simulation results, the behavior of polymer resist is investigated during the imprinting process. The mechanism of resist deformation is analyzed by considering various parameters including the surface geometry, atom distribution, and density. Especially, the density in the bottom (emboss) region is found to be larger than the top (cavity) region due to compression of polymer molecules. The result indicates that small scale patterning of polymer resist largely depends on compression rather than the flow of molecules. The numerical results are compared with the local density measurement data using the atomic force microscope (AFM). They exhibit a similar behavior at least in a qualitative sense. Additional simulations, where the stamp geometry and molecular mobility are varied and are performed to investigate the deformation characteristics of polymer resist. From these simulations, important elements for understanding of NIL process are obtained.

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The effects of thin-film thickness on the formaton of metallic patterns by direct nanoimprint

Cited by 9 publications

References 13 publications

Fabrication sub-10nm metallic gratings with carbon nanotube - A study by molecular dynamics simulation method

Fabrication sub-10nm metallic gratings with carbon nanotube - A study by molecular dynamics simulation method

Casting metal microstructures from a flexible and reusable mold

Molecular Dynamic Studies on Deformation of Polymer Resist During Thermal Nano Imprint Lithographic Process

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