Improving Yield and Performance in ZnO Thin-Film Transistors Made Using Selective Area Deposition

Nelson, Shelby F.; Ellinger, Carolyn R.; Levy, David H.

doi:10.1021/am5077638

Cited by 28 publications

(39 citation statements)

References 18 publications

(34 reference statements)

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“…[59] In addition to improving the switching and turn-on properties of the devices, optimizing substrate preparation and the insulator deposition process may improve field-effect mobility to more closely rival quaternary indium-containing ALD TFTs. [60] Prior work, using different deposition techniques or semiconductor oxides, has shown that activelayer thickness must be optimized to obtain good TFT stability [61] and enhancement mode behavior. [62] To investigate the effect of ZTO layer thickness on TFT behavior, three identical devices were fabricated using 5, 9, and 13 nm ZTO films deposited using the thermal ALD process at 200 ºC with post-deposition annealing at 500 ºC.…”

Section: Electrical Properties Of Ald Zto Thin-film Transistorsmentioning

confidence: 99%

High‐Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition

Allemang

Cho

Trejo

et al. 2020

Adv Elect Materials

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New deposition techniques for amorphous oxide semiconductors compatible with silicon back end of line manufacturing are needed for 3D monolithic integration of thin‐film electronics. Here, three atomic layer deposition (ALD) processes are compared for the fabrication of amorphous zinc tin oxide (ZTO) channels in bottom‐gate, top‐contact n‐channel transistors. As‐deposited ZTO films, made by ALD at 150–200 °C, exhibit semiconducting, enhancement‐mode behavior with electron mobility as high as 13 cm2 V−1 s−1, due to a low density of oxygen‐related defects. ZTO deposited at 200 °C using a hybrid thermal‐plasma ALD process with an optimal tin composition of 21%, post‐annealed at 400 °C, shows excellent performance with a record high mobility of 22.1 cm2 V–1 s–1 and a subthreshold slope of 0.29 V dec–1. Increasing the deposition temperature and performing post‐deposition anneals at 300–500 °C lead to an increased density of the X‐ray amorphous ZTO film, improving its electrical properties. By optimizing the ZTO active layer thickness and using a high‐k gate insulator (ALD Al2O3), the transistor switching voltage is lowered, enabling electrical compatibility with silicon integrated circuits. This work opens the possibility of monolithic integration of ALD ZTO‐based thin‐film electronics with silicon integrated circuits or onto large‐area flexible substrates.

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Section: Electrical Properties Of Ald Zto Thin-film Transistorsmentioning

confidence: 99%

High‐Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition

Allemang

Cho

Trejo

et al. 2020

Adv Elect Materials

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“…Zinc oxide (ZnO) is a popular material which has been paid much attention due to its excellent optical and electrical properties. The applications of ZnO include solar cells, light-emitting diodes (LEDs), gas sensors, and thin-film transistors (TFTs) [ 1 , 2 , 3 , 4 , 5 ]. ZnO film can be prepared by several techniques, such as pulsed laser deposition (PLD), sputtering, chemical vapor deposition (CVD), solution-based methods, atomic layer deposition (ALD), and molecular beam epitaxy (MBE) [ 6 , 7 , 8 , 9 , 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

Suppression of Oxygen Vacancy Defects in sALD-ZnO Films Annealed in Different Conditions

et al. 2020

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Zinc oxide (ZnO) has drawn much attention due to its excellent optical and electrical properties. In this study, ZnO film was prepared by a high-deposition-rate spatial atomic layer deposition (ALD) and subjected to a post-annealing process to suppress the intrinsic defects and improve the crystallinity and film properties. The results show that the film thickness increases with annealing temperature owing to the increment of oxide layer caused by the suppression of oxygen vacancy defects as indicated by the X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) spectra. The film transmittance is seldom influenced by annealing. The refractive index increases with annealing temperature at 300–700 °C, possibly due to higher density and crystallinity of the film. The band gap decreases after annealing, which should be ascribed to the decrease in carrier concentration according to Burstein–Moss model. The carrier concentration decreases with increasing annealing temperature at 300–700 °C since the oxygen vacancy defects are suppressed, then it increases at 800 °C possibly due to the out-diffusion of oxygen atoms from the film. Meanwhile, the carrier mobility increases with temperature due to higher crystallinity and larger crystallite size. The film resistivity increases at 300–700 °C then decreases at 800 °C, which should be ascribed primarily to the variation of carrier concentration.

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“…Spatial Atomic Layer Deposition (SALD) is a technique based on the same principles of conventional (also called temporal) ALD, whose popularity is growing among the materials research community due to the fast deposition rates it offers, ranging from 20 to 40 nm/min, and to the large-area deposition capabilities at atmospheric pressure, and even in the open air, thus making it very appealing for the industry [3,4]. In addition, it offers the possibility of area-selective deposition [5,6], simplicity of installation, and allows depositing high-quality materials with a higher throughput than ALD.…”

Section: Introductionmentioning

confidence: 99%

Influence of the Geometric Parameters on the Deposition Mode in Spatial Atomic Layer Deposition: A Novel Approach to Area-Selective Deposition

et al. 2018

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Within the materials deposition techniques, Spatial Atomic Layer Deposition (SALD) is gaining momentum since it is a high throughput and low-cost alternative to conventional atomic layer deposition (ALD). SALD relies on a physical separation (rather than temporal separation, as is the case in conventional ALD) of gas-diluted reactants over the surface of the substrate by a region containing an inert gas. Thus, fluid dynamics play a role in SALD since precursor intermixing must be avoided in order to have surface-limited reactions leading to ALD growth, as opposed to chemical vapor deposition growth (CVD). Fluid dynamics in SALD mainly depends on the geometry of the reactor and its components. To quantify and understand the parameters that may influence the deposition of films in SALD, the present contribution describes a Computational Fluid Dynamics simulation that was coupled, using Comsol Multiphysics®, with concentration diffusion and temperature-based surface chemical reactions to evaluate how different parameters influence precursor spatial separation. In particular, we have used the simulation of a close-proximity SALD reactor based on an injector manifold head. We show the effect of certain parameters in our system on the efficiency of the gas separation. Our results show that the injector head-substrate distance (also called deposition gap) needs to be carefully adjusted to prevent precursor intermixing and thus CVD growth. We also demonstrate that hindered flow due to a non-efficient evacuation of the flows through the head leads to precursor intermixing. Finally, we show that precursor intermixing can be used to perform area-selective deposition.

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Improving Yield and Performance in ZnO Thin-Film Transistors Made Using Selective Area Deposition

Cited by 28 publications

References 18 publications

High‐Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition

High‐Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition

Suppression of Oxygen Vacancy Defects in sALD-ZnO Films Annealed in Different Conditions

Influence of the Geometric Parameters on the Deposition Mode in Spatial Atomic Layer Deposition: A Novel Approach to Area-Selective Deposition

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