2015
DOI: 10.1063/1.4928320
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Formation of strain-induced quantum dots in gated semiconductor nanostructures

Abstract: Elastic strain changes the energies of the conduction band in a semiconductor, which will affect transport through a semiconductor nanostructure. We show that the typical strains in a semiconductor nanostructure from metal gates are large enough to create strain-induced quantum dots (QDs). We simulate a commonly used QD device architecture, metal gates on bulk silicon, and show the formation of strain-induced QDs. The strain-induced QD can be eliminated by replacing the metal gates with poly-silicon gates. Thu… Show more

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Cited by 72 publications
(79 citation statements)
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“…Some silicides, when oxidized, form metallic oxides, while others form SiO 2 [53]. Devices made in this way will help to reduce the resistance of gates made of polySi so that they can be operated at higher frequencies and may reduce the tendency of metallic gates to produce strain-induced barriers [54]. If those devices are also immune to the effects of charge offset drift, they may represent a large advance in the capability of current all-silicon based devices.…”
Section: Discussionmentioning
confidence: 99%
“…Some silicides, when oxidized, form metallic oxides, while others form SiO 2 [53]. Devices made in this way will help to reduce the resistance of gates made of polySi so that they can be operated at higher frequencies and may reduce the tendency of metallic gates to produce strain-induced barriers [54]. If those devices are also immune to the effects of charge offset drift, they may represent a large advance in the capability of current all-silicon based devices.…”
Section: Discussionmentioning
confidence: 99%
“…Aluminium gate electrodes were fabricated using multi-layer gate stack technology 34 . Quantum dots D1 and D2 are formed underneath gates G1 and G2, however the exact dot centre positions can be influenced by local strain fields in the device 35 . The tunnel rate between the dots and the reservoir RG (yellow) can be modified by adjusting the voltages on G3 and G4 (grey).…”
mentioning
confidence: 99%
“…disorder or strain48. In case of the latter the conduction or valence band is modulated by strain, induced by the difference in thermal expansion coefficients between the silicon and the aluminum gates in the heterostructure.…”
mentioning
confidence: 99%