We describe important considerations to create top-down fabricated planar quantum dots in silicon, often not discussed in detail in literature. The subtle interplay between intrinsic material properties, interfaces and fabrication processes plays a crucial role in the formation of electrostatically defined quantum dots. Processes such as oxidation, physical vapor deposition and atomic-layer deposition must be tailored in order to prevent unwanted side effects such as defects, disorder and dewetting. In two directly related manuscripts written in parallel we use techniques described in this work to create depletion-mode quantum dots in intrinsic silicon, and low-disorder silicon quantum dots defined with palladium gates. While we discuss three different planar gate structures, the general principles also apply to 0D and 1D systems, such as self-assembled islands and nanowires. 1 arXiv:1709.08866v3 [cond-mat.mes-hall]
Feb 2018Dealing with the fragility of the quantum coherent state is one of the key issues on the road to meet the limits posited by quantum computation schemes 1 . It is the coupling of quantum states to states in an unknown environment which is the driver for decoherence. The properties of the environment therefore dictate the performance of a quantum bit (qubit).Creating qubits in the solid state means that the environment consists of many different materials and structures used in device construction. give rise to interactions detrimental to qubit creation and readout.The hyperfine interaction of nuclear spins in the host material and the qubit is one such effect. The non-zero-spin isotopes in a material create a nuclear-spin-bath and cause decoherence of the quantum state. This is the motivation for the use of isotopically purified silicon as a host material for spin qubits 9,10 . The purified silicon, now containing predomi-Si, results in a zero-nuclear-spin isotope system, and eliminates the fluctuations in the spin bath, which are detrimental.Field noise, such as charge-and spin-noise 11 can also influence the lifetime of the quantum state. One strategy to deal with these fluctuations is to tune the quantum dots to certain regimes in phase space where the energy levels of interest are insensitive to these fields. This can happen in the clock transition of Bi dopants in Si 12 , by dressing qubits and tuning them appropriately 13 , or for hybrid quantum dots. 14 Another effect that can influence quantum states are fluctuations in the electrochemical potential at longer timescales. These have been shown to occur due to charge offsets fluctuating over time in glassy media and their intrinsic two-level systems (TLS).
15,16Finally, unintentional quantum dots, charge traps, or charge defects can influence a de- This article has the intention to provide a foothold for entrants in the field (e.g. starting graduate students) and elucidate mechanisms that need to be taken into account when designing and fabricating these devices in the solid state. It can be read back to front, and may also serve well ...