Epitaxial nucleation of diamond on an iridium substrate by bias treatment, for microwave plasma-assisted chemical vapor deposition

Saito, Takeyasu; Tsuruga, Shigenori; Ohya, Nobutaka; Kusakabe, Katsuki; Morooka, Shigeharu; Maeda, Hideaki; Sawabe, Atsuhito; Suzuki, Kazuhiro

doi:10.1016/s0925-9635(98)00216-7

Cited by 33 publications

(9 citation statements)

References 20 publications

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“…This suggests that diamond nuclei are somehow protected from the CVD plasma during the BEN step. A pseudo-2D growth mode was subsequently reported during the growth step [3,4]. This finding may explain the higher crystalline quality of the epitaxial diamond layers that were grown on iridium [1,5,6].…”

Section: Introductionmentioning

confidence: 89%

Heteroepitaxial diamond on iridium: New insights on domain formation

Vaissière

Saada

Bouttemy

et al. 2013

Diamond and Related Materials

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Topography and chemical evolutions of the iridium surface in the successive steps of bias-enhanced nucleation and growth were investigated using scanning electron microscopy (SEM), atomic force microscopy (AFM), and nano-Auger analyses. This sequential approach, which was performed in localized areas at the nanoscale, provides three new experimental and complementary concepts that can enhance the knowledge of nucleation pathways on iridium. First, SEM imaging at low-acceleration voltage enables the detection of diamond nuclei or stable precursors after the BEN step. Second, domains consist of iridium furrows that are covered by an amorphous carbon overlayer, with a thickness of 6.8 nm, according to AFM and X-ray photoemission spectroscopy data. Third, SEM observations also suggest a close relationship between furrows created under ion bombardment and domains in our study conditions. These results prompted us to propose a scheme that describes the topography and surface chemistry of domains.

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Section: Introductionmentioning

confidence: 89%

Heteroepitaxial diamond on iridium: New insights on domain formation

Vaissière

Saada

Bouttemy

et al. 2013

Diamond and Related Materials

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“…In [9,10] a sharpened molybdenum rod was used as electrode to induce diamond nucleation in a microwave plasma. After BEN circular islands with a lateral size of several μm and a height of 2-3 nm were observed by SEM and AFM, respectively.…”

Section: Introductionmentioning

confidence: 99%

Combined AFM–SEM study of the diamond nucleation layer on Ir(001)

Gsell

Schreck

Benstetter

et al. 2007

Diamond and Related Materials

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“…In this method, diamond is nucleated by the application of a negative bias for a short period of time. This potential accelerates carbon reactive species to substrate surface, forming sp 3 and sp 2 hybridization nuclei for growth; as soon as the bias is turned off, atomic hydrogen etches nondiamond phases and only the diamond oriented particles grow until they coalesce and form a continuous oriented film [86][87][88][89][90][91].…”

Section: Cvd Diamond Heat Sinksmentioning

confidence: 99%

Development, Properties, and Applications of CVD Diamond-Based Heat Sinks

Neto¹,

Fraga²,

Trava-Airoldi³

2020

Some Aspects of Diamonds in Scientific Research and High Technology

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Heat sink is an essential component to nanoelectronics, microelectronics, and optoelectronics applications because it allows the thermal management of devices such as integrated circuits (ICs), microelectromechanical systems (MEMSs), and graphic unit processing. There are different materials being employed for heat sink production. Among them, diamond has stood out due to its excellent chemical and physical properties. This book chapter focuses on the development, properties, and applications of CVD diamond heat sinks. It covers the basic concepts of heat conduction applied to CVD diamond as a heat sink material and its production as freestanding CVD wafers of polycrystalline CVD diamond, since the literature about this topic is extensive, giving the reader a comprehensive overview. We will comprise the use and potential widening of applications of in CVD diamond heat sink technology, providing the reader with a substantial background at the current development of solutions and new frontiers in the practical use of CVD diamond thermal management devices.

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Epitaxial nucleation of diamond on an iridium substrate by bias treatment, for microwave plasma-assisted chemical vapor deposition

Cited by 33 publications

References 20 publications

Heteroepitaxial diamond on iridium: New insights on domain formation

Heteroepitaxial diamond on iridium: New insights on domain formation

Combined AFM–SEM study of the diamond nucleation layer on Ir(001)

Development, Properties, and Applications of CVD Diamond-Based Heat Sinks

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